Starbuck, Colin Malcolm Kitson (1982) The production and doping of LPCVD polysilicon for NMOS integrated circuit technology. University of Southampton, Doctoral Thesis.
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Published date: 1982
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Local EPrints ID: 460409
URI: http://eprints.soton.ac.uk/id/eprint/460409
PURE UUID: 9dc61e4e-1f8f-442d-a391-3077feb2454e
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Date deposited: 04 Jul 2022 18:21
Last modified: 16 Mar 2024 18:38
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Author:
Colin Malcolm Kitson Starbuck
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