Automated nondestructive measurement of infrared emission from free carriers in silicon devices
Automated nondestructive measurement of infrared emission from free carriers in silicon devices
The main objective of the research reported in this thesis is the development, automation, and consequent application of an infrared (IR) measurement system. The IR measurement techniques are generally known to enjoy a growing importance in the field of microelectronics industry. The main reason behind this, is the fact that they are contactless and nondestructive. The emissivity technique was previously implemented in a manual IR measurement system, and proved to have useful applications, yet its implementation suffered from many drawbacks which hindered its practical use. Most important of these limitations was the absence of any computing power. This has been primarily remedied by employing an M6800 microprocessor to automate the system performance. A PET microcomputer and, later, an IBM PC have been used to improve the signal recovery process. Both the sensitivity and the resolution of the automated measurement system are improved using some arrangements, while some others are suggested to further this cause. Some experiments have been carried out with the new system, to measure the optically-injected carrier lifetime and diffusion length, and to investigate the effect of the window size on the sheet resistance. The reported results are in good agreement with those obtained by other researchers. Some more useful and far-reaching needed applications, using this automated measurement system, are also mentioned. Interesting results of the application of advanced signal processing techniques are reported, and suitable conclusions are drawn. Having been improved and automated, the new system invites an array of additional applications in characterizing different semiconductor materials prevalent in the current solid state technologies.
University of Southampton
Takleh, Omar Abdul-Lateef
1988
Takleh, Omar Abdul-Lateef
Takleh, Omar Abdul-Lateef
(1988)
Automated nondestructive measurement of infrared emission from free carriers in silicon devices.
University of Southampton, Doctoral Thesis.
Record type:
Thesis
(Doctoral)
Abstract
The main objective of the research reported in this thesis is the development, automation, and consequent application of an infrared (IR) measurement system. The IR measurement techniques are generally known to enjoy a growing importance in the field of microelectronics industry. The main reason behind this, is the fact that they are contactless and nondestructive. The emissivity technique was previously implemented in a manual IR measurement system, and proved to have useful applications, yet its implementation suffered from many drawbacks which hindered its practical use. Most important of these limitations was the absence of any computing power. This has been primarily remedied by employing an M6800 microprocessor to automate the system performance. A PET microcomputer and, later, an IBM PC have been used to improve the signal recovery process. Both the sensitivity and the resolution of the automated measurement system are improved using some arrangements, while some others are suggested to further this cause. Some experiments have been carried out with the new system, to measure the optically-injected carrier lifetime and diffusion length, and to investigate the effect of the window size on the sheet resistance. The reported results are in good agreement with those obtained by other researchers. Some more useful and far-reaching needed applications, using this automated measurement system, are also mentioned. Interesting results of the application of advanced signal processing techniques are reported, and suitable conclusions are drawn. Having been improved and automated, the new system invites an array of additional applications in characterizing different semiconductor materials prevalent in the current solid state technologies.
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Published date: 1988
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Local EPrints ID: 460891
URI: http://eprints.soton.ac.uk/id/eprint/460891
PURE UUID: 3445b17a-190e-4d1b-a4cb-3227f341dd18
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Date deposited: 04 Jul 2022 18:31
Last modified: 04 Jul 2022 18:31
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Author:
Omar Abdul-Lateef Takleh
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