The diffusion and electrical activation of rapid thermally annealed arsenic implanted silicon
The diffusion and electrical activation of rapid thermally annealed arsenic implanted silicon
University of Southampton
1992
Altrip, John Lawrence
(1992)
The diffusion and electrical activation of rapid thermally annealed arsenic implanted silicon.
University of Southampton, Doctoral Thesis.
Record type:
Thesis
(Doctoral)
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Published date: 1992
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Local EPrints ID: 462082
URI: http://eprints.soton.ac.uk/id/eprint/462082
PURE UUID: b6707e8b-a816-4318-9be8-a4cdd408d5ed
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Date deposited: 04 Jul 2022 19:01
Last modified: 04 Jul 2022 19:01
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Author:
John Lawrence Altrip
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