Technology and operation of surface - and bulk - channel charge-coupled devices
Technology and operation of surface - and bulk - channel charge-coupled devices
Two novel techniques for fabricating charge-coupled devices are investigated; one is based on a modified molybdenum gate MOSFET process, the other relies on the 'shadowing' effect produced by the oblique ZL deposition of metal in an otherwise standard evaporation process. Experimental investigation established that the latter technique was simpler and more reliable and offered several advantages over more conventional fabrication technologies. In particular sub-micron interelectrode gaps are formed in such a manner that no critical alignments or special photolithographic techniques are required. Furthermore two-phase CCD's fabricated by this technique have the storage and barrier electrodes of each element automatically joined together, thereby simplifying the electrode interconnection pattern subsequently required. The development of the shadowing technique necessitated investigations into the profile of chemically, etched. silicon dioxide steps and the formation of obliquely deposited thin metal films on castellated oxide structures. The establishment of a very simple, yet reliable, CCD fabrication technique has allowed various aspects of CCD operation to be investigated. In particular a very simple driving technique for two-phase CCD's has been developed requiring only one clock to perform(a) linear charge injection; (b) charge transfer and (c) the resetting of a floating sense diffusion at the output. The technique has significant advantages for many CCD applications where currently the high number of clock waveforms required are a serious handicap,particularly in high or variable frequency operation. Arising from the one-clock driving technique has been the development of an extremely simple, method of measuring the charge transfer inefficiency] of two-phase CCDIs. The thesis concludes with a study of bulk-channel charge-coupled devices; this includes a physical based, one-dimensional analysis of BCCD's together with the development of a simple equivalent circuit model of the BCCD structure. Design considerations for two-phase stepped oxide BCCD's are also discussed and experiments performed on bulk-channel structures. The results of these experiments are in good, agreement with theory, hereby establishing the feasibility of fabricating two-phase stepped oxide BCCD structures.
University of Southampton
1975
Haken, Roger Alan
(1975)
Technology and operation of surface - and bulk - channel charge-coupled devices.
University of Southampton, Doctoral Thesis.
Record type:
Thesis
(Doctoral)
Abstract
Two novel techniques for fabricating charge-coupled devices are investigated; one is based on a modified molybdenum gate MOSFET process, the other relies on the 'shadowing' effect produced by the oblique ZL deposition of metal in an otherwise standard evaporation process. Experimental investigation established that the latter technique was simpler and more reliable and offered several advantages over more conventional fabrication technologies. In particular sub-micron interelectrode gaps are formed in such a manner that no critical alignments or special photolithographic techniques are required. Furthermore two-phase CCD's fabricated by this technique have the storage and barrier electrodes of each element automatically joined together, thereby simplifying the electrode interconnection pattern subsequently required. The development of the shadowing technique necessitated investigations into the profile of chemically, etched. silicon dioxide steps and the formation of obliquely deposited thin metal films on castellated oxide structures. The establishment of a very simple, yet reliable, CCD fabrication technique has allowed various aspects of CCD operation to be investigated. In particular a very simple driving technique for two-phase CCD's has been developed requiring only one clock to perform(a) linear charge injection; (b) charge transfer and (c) the resetting of a floating sense diffusion at the output. The technique has significant advantages for many CCD applications where currently the high number of clock waveforms required are a serious handicap,particularly in high or variable frequency operation. Arising from the one-clock driving technique has been the development of an extremely simple, method of measuring the charge transfer inefficiency] of two-phase CCDIs. The thesis concludes with a study of bulk-channel charge-coupled devices; this includes a physical based, one-dimensional analysis of BCCD's together with the development of a simple equivalent circuit model of the BCCD structure. Design considerations for two-phase stepped oxide BCCD's are also discussed and experiments performed on bulk-channel structures. The results of these experiments are in good, agreement with theory, hereby establishing the feasibility of fabricating two-phase stepped oxide BCCD structures.
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Published date: 1975
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Local EPrints ID: 462513
URI: http://eprints.soton.ac.uk/id/eprint/462513
PURE UUID: a0edd5cb-d51f-4d6a-a0be-69ea7cc8a467
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Date deposited: 04 Jul 2022 19:11
Last modified: 04 Jul 2022 19:11
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Author:
Roger Alan Haken
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