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Near-infrared photodetectors and optical interconnects fabricated monolithically on silicon

Near-infrared photodetectors and optical interconnects fabricated monolithically on silicon
Near-infrared photodetectors and optical interconnects fabricated monolithically on silicon

Integrating CMOS with optical communications technology on a silicon wafer can be achieved with the fabrication of a near-infrared photodetector in silicon. The camel diode photodetector has been developed to detect infrared light at optical communications frequencies. This all-silicon device uses free carrier absorption to excite majority carriers, which are emitted over a potential barrier. In addition, a novel optical interconnect has been developed which can incorporate the camel diode, to provide optical containment without silicon-on-insulator technology. Electrical and optical isolation from the substrate is achieved by undercutting the waveguiding region and thermally oxidizing the supporting trunk.

University of Southampton
Johnston, Ian Ronald
Johnston, Ian Ronald

Johnston, Ian Ronald (1997) Near-infrared photodetectors and optical interconnects fabricated monolithically on silicon. University of Southampton, Doctoral Thesis.

Record type: Thesis (Doctoral)

Abstract

Integrating CMOS with optical communications technology on a silicon wafer can be achieved with the fabrication of a near-infrared photodetector in silicon. The camel diode photodetector has been developed to detect infrared light at optical communications frequencies. This all-silicon device uses free carrier absorption to excite majority carriers, which are emitted over a potential barrier. In addition, a novel optical interconnect has been developed which can incorporate the camel diode, to provide optical containment without silicon-on-insulator technology. Electrical and optical isolation from the substrate is achieved by undercutting the waveguiding region and thermally oxidizing the supporting trunk.

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Published date: 1997

Identifiers

Local EPrints ID: 463051
URI: http://eprints.soton.ac.uk/id/eprint/463051
PURE UUID: 21c6fc76-726e-4a55-9985-d75939e01ea5

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Date deposited: 04 Jul 2022 20:41
Last modified: 04 Jul 2022 20:41

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Contributors

Author: Ian Ronald Johnston

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