Silicon micromachined pumps employing piezoelectric membrane actuation for microfluidic systems
Silicon micromachined pumps employing piezoelectric membrane actuation for microfluidic systems
Microsystems technology is a rapidly expanding area that comprises electronics, mechanics and optics. In this field, physical/chemical sensing, fluid handling and optical communication are emerging as potential markets. Microfluidic systems like an implantable insulin pump, a drug delivery system and a total chemical analysis system are currently being developed by academia and industry around the world.
This project contributes to the area of microfluidics in that a novel thick-film-on-silicon membrane actuator has been developed to allow inexpensive mass production of micropumps. To date piezoelectric plates have been surface mounted onto a silicon membrane. This single chip fabrication method can now be replaced by screen printing thick piezoelectric layers onto 4 inch silicon substrates.
Two different pump types have been developed. These are membrane pumps with either cantilever values or diffuser/nozzle valves. Pump rates between 100 and 200 μl min-1 and backpressures up to 4 kPa have been achieved with these pumps.
Along with the technology of micropumps, simulators have been developed. A novel coupled FEM-CFD solver was realised by a computer controlled coupling of two commercially available packages (ANSYS and CFX-Flow3D). The results of this simulator were in good agreement with measurements on micromachined cantilever values. CFX-Flow3D was also used to successfully model the behaviour of the diffuser/nozzle value. Finally, the pump has been simulated using a continuity equation. A behavioural dynamic extension of the cantilever value was necessary to achieve better prediction of the pump rates for higher frequencies.
As well, a common process has been developed for microfluidic devices like micromixers, particle counters and sorters as well as flow sensors. The micromixer has been tested already and achieves mixing for input pressures between 2 and 7 kPa. This agrees with simulations of the diffusive mixing with CFX-Flow3D. Together with the micropump, a combination of these devices allows future development of microfluidic systems for the medical and (bio)chemical market.
University of Southampton
Koch, Michael
36f9534a-fd17-4517-98a3-e774ff1fc9b1
1997
Koch, Michael
36f9534a-fd17-4517-98a3-e774ff1fc9b1
Koch, Michael
(1997)
Silicon micromachined pumps employing piezoelectric membrane actuation for microfluidic systems.
University of Southampton, Doctoral Thesis.
Record type:
Thesis
(Doctoral)
Abstract
Microsystems technology is a rapidly expanding area that comprises electronics, mechanics and optics. In this field, physical/chemical sensing, fluid handling and optical communication are emerging as potential markets. Microfluidic systems like an implantable insulin pump, a drug delivery system and a total chemical analysis system are currently being developed by academia and industry around the world.
This project contributes to the area of microfluidics in that a novel thick-film-on-silicon membrane actuator has been developed to allow inexpensive mass production of micropumps. To date piezoelectric plates have been surface mounted onto a silicon membrane. This single chip fabrication method can now be replaced by screen printing thick piezoelectric layers onto 4 inch silicon substrates.
Two different pump types have been developed. These are membrane pumps with either cantilever values or diffuser/nozzle valves. Pump rates between 100 and 200 μl min-1 and backpressures up to 4 kPa have been achieved with these pumps.
Along with the technology of micropumps, simulators have been developed. A novel coupled FEM-CFD solver was realised by a computer controlled coupling of two commercially available packages (ANSYS and CFX-Flow3D). The results of this simulator were in good agreement with measurements on micromachined cantilever values. CFX-Flow3D was also used to successfully model the behaviour of the diffuser/nozzle value. Finally, the pump has been simulated using a continuity equation. A behavioural dynamic extension of the cantilever value was necessary to achieve better prediction of the pump rates for higher frequencies.
As well, a common process has been developed for microfluidic devices like micromixers, particle counters and sorters as well as flow sensors. The micromixer has been tested already and achieves mixing for input pressures between 2 and 7 kPa. This agrees with simulations of the diffusive mixing with CFX-Flow3D. Together with the micropump, a combination of these devices allows future development of microfluidic systems for the medical and (bio)chemical market.
Text
516396.pdf
- Version of Record
More information
Published date: 1997
Identifiers
Local EPrints ID: 463154
URI: http://eprints.soton.ac.uk/id/eprint/463154
PURE UUID: 39d2eef0-1d58-4f54-9da7-2d40f3f3ea5c
Catalogue record
Date deposited: 04 Jul 2022 20:46
Last modified: 16 Mar 2024 19:02
Export record
Contributors
Author:
Michael Koch
Download statistics
Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.
View more statistics