Micro Scanning Probes

Abstract

This thesis covers the design methodology, theory, modelling, fabrication and evaluation of a Micro-Scanning-Probe. The device is a thermally actuated biomorph quadrapod fabricated using Micro Electro Mechanical Systems technology. A quadrapod is a structure with four arms, in this case a planar structure with the four arms forming a cross which is dry etched out of a silicon diaphragm. Each arm has a layer of aluminium deposited on it forming a bimorph. Through heating each arm actuation is achieved in the plane of the quadrapod and the direction normal to it.

Fabrication of the device has required the development of bulk micromachining techniques to handle post CMOS fabricated wafers and the patterning of thickly sputtered aluminium in bulk micro machined cavities. CMOS fabrication techniques were used to incorporate diodes onto the quadrapod arms for temperature measurement of the arms. Fine tungsten and silicon tips have also been fabricated to allow tunnelling between the tip and the platform at the centre of the quadrapod. This has allowed the sub-nanometer control of the device in the direction normal to the plane of scanning.

Electronics and control systems using a PC-LabCard have been developed to investigate the actuation of the device, with coarse movement of over 250μm and sub-nanometer control. Temperature control in the μ^oC has also been achieved.

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