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Spectral characterisation and tuning effect of picometre-scale thermomechanical motion for silicon NEMS resonators

Spectral characterisation and tuning effect of picometre-scale thermomechanical motion for silicon NEMS resonators
Spectral characterisation and tuning effect of picometre-scale thermomechanical motion for silicon NEMS resonators
Fernando, James
5e710732-a69b-4ee0-bb61-066aaf5dadea
Ben, Fang
9e86862a-4dff-42d1-91f2-b799c1b4bd65
Ou, Jun-Yu
3fb703e3-b222-46d2-b4ee-75f296d9d64d
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
Fernando, James
5e710732-a69b-4ee0-bb61-066aaf5dadea
Ben, Fang
9e86862a-4dff-42d1-91f2-b799c1b4bd65
Ou, Jun-Yu
3fb703e3-b222-46d2-b4ee-75f296d9d64d
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2

Fernando, James, Ben, Fang, Ou, Jun-Yu and Tsuchiya, Yoshishige (2021) Spectral characterisation and tuning effect of picometre-scale thermomechanical motion for silicon NEMS resonators. 47th Micro and Nano Engineering Conference, Turin and Online, Turin, Italy. 20 - 23 Sep 2021.

Record type: Conference or Workshop Item (Paper)
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Published date: September 2021
Venue - Dates: 47th Micro and Nano Engineering Conference, Turin and Online, Turin, Italy, 2021-09-20 - 2021-09-23

Identifiers

Local EPrints ID: 467484
URI: http://eprints.soton.ac.uk/id/eprint/467484
PURE UUID: 93f5e07b-b950-4ec6-8de4-2413ad307130
ORCID for James Fernando: ORCID iD orcid.org/0000-0002-2526-8455
ORCID for Fang Ben: ORCID iD orcid.org/0000-0002-8486-5583
ORCID for Jun-Yu Ou: ORCID iD orcid.org/0000-0001-8028-6130

Catalogue record

Date deposited: 11 Jul 2022 16:42
Last modified: 10 May 2024 01:54

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Contributors

Author: James Fernando ORCID iD
Author: Fang Ben ORCID iD
Author: Jun-Yu Ou ORCID iD
Author: Yoshishige Tsuchiya

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