Spectral characterisation and tuning effect of picometre-scale thermomechanical motion for silicon NEMS resonators

Fernando, James, Ben, Fang, Ou, Jun-Yu and Tsuchiya, Yoshishige (2021) Spectral characterisation and tuning effect of picometre-scale thermomechanical motion for silicon NEMS resonators. 47th Micro and Nano Engineering Conference, Turin and Online, Turin, Italy. 20 - 23 Sep 2021.

Record type: Conference or Workshop Item (Paper)

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Published date: September 2021

Venue - Dates: 47th Micro and Nano Engineering Conference, Turin and Online, Turin, Italy, 2021-09-20 - 2021-09-23

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Local EPrints ID: 467484

URI: http://eprints.soton.ac.uk/id/eprint/467484

PURE UUID: 93f5e07b-b950-4ec6-8de4-2413ad307130

ORCID for James Fernando:

orcid.org/0000-0002-2526-8455

ORCID for Fang Ben:

orcid.org/0000-0002-8486-5583

ORCID for Jun-Yu Ou:

orcid.org/0000-0001-8028-6130

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Date deposited: 11 Jul 2022 16:42

Last modified: 27 Jul 2024 02:11

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Contributors

Author: James Fernando

Author: Fang Ben

Author: Jun-Yu Ou

Author: Yoshishige Tsuchiya

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