Modelling of Nonlinear Resonance Behavior in 1-ω Mixing Measurement for 125-MHz Silicon Nanoelectromechanical Resonator
Modelling of Nonlinear Resonance Behavior in 1-ω Mixing Measurement for 125-MHz Silicon Nanoelectromechanical Resonator
This paper reports a novel attempt to build a model of nonlinear resonance behavior of very-high-frequency silicon nanoelectromechanical (NEM) resonators observed via 1-omega mixing resonance measurements. Time-dependent gate-beam voltage on the mixing measurement condition has been incorporated with the Duffing oscillator equation which is solved to fit a set of experimental data taken under varying the actuation voltage and RF power. Systematic fitting results for the resonance data of 1.5-µm-long beams with reasonable fitting parameters have successfully traced the characteristic asymmetric line shape and the onset of hysteresis around at the frequency of 125 MHz. The method enables us to predict nonlinear resonance behavior at the device design stage, which will be particularly useful for designing integrated nonlinear resonator systems in future.
Nanoelectromechanical (NEM) systems, Nonlinear analysis, Modelling
Ben, Fang
9e86862a-4dff-42d1-91f2-b799c1b4bd65
Fernando, James
a97e7403-b5bb-4bc4-9358-a3bf3cfcdcdc
Ou, Jun-Yu
3fb703e3-b222-46d2-b4ee-75f296d9d64d
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
23 September 2022
Ben, Fang
9e86862a-4dff-42d1-91f2-b799c1b4bd65
Fernando, James
a97e7403-b5bb-4bc4-9358-a3bf3cfcdcdc
Ou, Jun-Yu
3fb703e3-b222-46d2-b4ee-75f296d9d64d
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
Ben, Fang, Fernando, James, Ou, Jun-Yu and Tsuchiya, Yoshishige
(2022)
Modelling of Nonlinear Resonance Behavior in 1-ω Mixing Measurement for 125-MHz Silicon Nanoelectromechanical Resonator.
48th Internaltional Conference on Micro and Nano Engineering - EuroSensor, , Leuven, Belgium.
19 - 23 Sep 2022.
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Conference or Workshop Item
(Paper)
Abstract
This paper reports a novel attempt to build a model of nonlinear resonance behavior of very-high-frequency silicon nanoelectromechanical (NEM) resonators observed via 1-omega mixing resonance measurements. Time-dependent gate-beam voltage on the mixing measurement condition has been incorporated with the Duffing oscillator equation which is solved to fit a set of experimental data taken under varying the actuation voltage and RF power. Systematic fitting results for the resonance data of 1.5-µm-long beams with reasonable fitting parameters have successfully traced the characteristic asymmetric line shape and the onset of hysteresis around at the frequency of 125 MHz. The method enables us to predict nonlinear resonance behavior at the device design stage, which will be particularly useful for designing integrated nonlinear resonator systems in future.
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Modelling of Nonlinear Resonance Behavior in 1-ω Mixing Measurement for 125-MHz Silicon Nanoelectromechanical Resonator
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Accepted/In Press date: 21 May 2022
Published date: 23 September 2022
Venue - Dates:
48th Internaltional Conference on Micro and Nano Engineering - EuroSensor, , Leuven, Belgium, 2022-09-19 - 2022-09-23
Keywords:
Nanoelectromechanical (NEM) systems, Nonlinear analysis, Modelling
Identifiers
Local EPrints ID: 467684
URI: http://eprints.soton.ac.uk/id/eprint/467684
PURE UUID: 2bfadeba-ca65-44d5-8da5-0bcede6e5305
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Date deposited: 19 Jul 2022 16:44
Last modified: 27 Jul 2024 02:11
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Contributors
Author:
Fang Ben
Author:
Jun-Yu Ou
Author:
Yoshishige Tsuchiya
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