UV-written silicon nitride integrated optical phased arrays
UV-written silicon nitride integrated optical phased arrays
Silicon nitride (SiNx), has been widely regarded as a CMOS photonics enabling material, facilitating the development of low-cost CMOS compatible waveguides and related photonic components. We have previously developed an NH3-free SiN PECVD platform in which its optical properties can be tailored. Here, we report on a new type of surface-emitting nitrogen-rich silicon nitride waveguide with antenna lengths of L > 5 mm. This is achieved by using a technique called small spot direct ultraviolet writing, capable of creating periodic refractive index changes ranging from -0.01 to -0.04. With this arrangement, a weak antenna radiation strength can be achieved, resulting in far-field beam widths < 0.0150, while maintaining a minimum feature size equal to 300 nm, which is compatible with DUV scanner lithography.
Optical phased array, Silicon Nitride, UV laser exposure
Ilie, S. T.
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De Paoli, G.
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Flint, A.
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Domínguez Bucio, Thalía
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Ginel-Moreno, P.
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Sagar, J.
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Ortega-Moñux, A.
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Lekkas, K.
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Rutirawut, T.
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Mastronardi, L.
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Skandalos, I.
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Molina-Fernandez, I.
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Kanellos, G. T.
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Cheben, P.
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Smith, P. G.R.
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Gates, J. C.
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Gardes, F. Y.
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2022
Ilie, S. T.
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De Paoli, G.
eafc5c8a-e30a-40d1-a57e-0beb7f85af72
Flint, A.
2314a288-92bc-44ca-9627-350eac1a7e26
Domínguez Bucio, Thalía
83b57799-c566-473c-9b53-92e9c50b4287
Ginel-Moreno, P.
ffd04b01-286b-46c3-9840-c24a0dbe15bd
Sagar, J.
bf69ce22-eb00-47d4-ba18-98c978cff547
Ortega-Moñux, A.
2187ad4e-6b90-4354-83ce-da964b85e0fe
Lekkas, K.
e5748e17-ba60-4d91-b8a9-d45e5ff0b7ec
Rutirawut, T.
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Mastronardi, L.
ea0aef76-de7e-4bdc-85be-1dc62dbf7802
Skandalos, I.
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Molina-Fernandez, I.
e7b4acfd-266a-410b-b4b6-1a9c482c77a0
Kanellos, G. T.
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Cheben, P.
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Smith, P. G.R.
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Gates, J. C.
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Gardes, F. Y.
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Ilie, S. T., De Paoli, G., Flint, A., Domínguez Bucio, Thalía, Ginel-Moreno, P., Sagar, J., Ortega-Moñux, A., Lekkas, K., Rutirawut, T., Mastronardi, L., Skandalos, I., Molina-Fernandez, I., Kanellos, G. T., Cheben, P., Smith, P. G.R., Gates, J. C. and Gardes, F. Y.
(2022)
UV-written silicon nitride integrated optical phased arrays.
He, Sailing, He, Sailing and Vivien, Laurent
(eds.)
In Smart Photonic and Optoelectronic Integrated Circuits 2022.
vol. 12005,
SPIE..
(doi:10.1117/12.2608824).
Record type:
Conference or Workshop Item
(Paper)
Abstract
Silicon nitride (SiNx), has been widely regarded as a CMOS photonics enabling material, facilitating the development of low-cost CMOS compatible waveguides and related photonic components. We have previously developed an NH3-free SiN PECVD platform in which its optical properties can be tailored. Here, we report on a new type of surface-emitting nitrogen-rich silicon nitride waveguide with antenna lengths of L > 5 mm. This is achieved by using a technique called small spot direct ultraviolet writing, capable of creating periodic refractive index changes ranging from -0.01 to -0.04. With this arrangement, a weak antenna radiation strength can be achieved, resulting in far-field beam widths < 0.0150, while maintaining a minimum feature size equal to 300 nm, which is compatible with DUV scanner lithography.
Text
Stefan_Ilie_Photonics_West_2022_Manuscript
- Version of Record
More information
Accepted/In Press date: 5 March 2022
Published date: 2022
Additional Information:
Funding Information:
The authors acknowledge the support of the Engineering and Physical Sciences Research Council (EPSRC) ( EP/R003076/1, EP/R513325/1, EP/N013247/1) and H2020 ICT-PLASMONIAC.
Publisher Copyright:
© 2022 SPIE.
Venue - Dates:
Smart Photonic and Optoelectronic Integrated Circuits 2022, , Virtual, Online, 2002-02-20 - 2002-02-24
Keywords:
Optical phased array, Silicon Nitride, UV laser exposure
Identifiers
Local EPrints ID: 468306
URI: http://eprints.soton.ac.uk/id/eprint/468306
ISSN: 0277-786X
PURE UUID: e5510838-122e-4cf9-b39b-ee82c3d44891
Catalogue record
Date deposited: 10 Aug 2022 16:30
Last modified: 09 Oct 2024 02:12
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Contributors
Author:
S. T. Ilie
Author:
G. De Paoli
Author:
A. Flint
Author:
Thalía Domínguez Bucio
Author:
P. Ginel-Moreno
Author:
J. Sagar
Author:
A. Ortega-Moñux
Author:
K. Lekkas
Author:
T. Rutirawut
Author:
L. Mastronardi
Author:
I. Skandalos
Author:
I. Molina-Fernandez
Author:
G. T. Kanellos
Author:
P. Cheben
Author:
P. G.R. Smith
Author:
J. C. Gates
Author:
F. Y. Gardes
Editor:
Sailing He
Editor:
Sailing He
Editor:
Laurent Vivien
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