Antimony germanium sulphide amorphous thin films fabricated by chemical vapour deposition
Antimony germanium sulphide amorphous thin films fabricated by chemical vapour deposition
Antimony germanium sulphide (Sb-Ge-S) amorphous thin films have been directly fabricated on both silica on silicon and commercial glass substrates by means of chemical vapour deposition. These Sb-Ge-S films have been characterized by micro-Raman, scanning electron microscopy and energy dispersive X-ray analysis techniques. The analysis results for these amorphous films indicate the composition of Sb-Ge-S can be varied by changing the deposition temperatures. The quality of these Sb-Ge-S amorphous thin films gives them high potential for the chalcogenide optical waveguide and device applications.
1344-1347
Huang, Chung-Che
825f7447-6d02-48f6-b95a-fa33da71f106
Knight, Kenton
341c08b7-a6e5-4264-9d15-9c911840f615
Hewak, Daniel
87c80070-c101-4f7a-914f-4cc3131e3db0
2007
Huang, Chung-Che
825f7447-6d02-48f6-b95a-fa33da71f106
Knight, Kenton
341c08b7-a6e5-4264-9d15-9c911840f615
Hewak, Daniel
87c80070-c101-4f7a-914f-4cc3131e3db0
Huang, Chung-Che, Knight, Kenton and Hewak, Daniel
(2007)
Antimony germanium sulphide amorphous thin films fabricated by chemical vapour deposition.
Optical Materials, 29 (11), .
(doi:10.1016/j.optmat.2006.06.017).
Abstract
Antimony germanium sulphide (Sb-Ge-S) amorphous thin films have been directly fabricated on both silica on silicon and commercial glass substrates by means of chemical vapour deposition. These Sb-Ge-S films have been characterized by micro-Raman, scanning electron microscopy and energy dispersive X-ray analysis techniques. The analysis results for these amorphous films indicate the composition of Sb-Ge-S can be varied by changing the deposition temperatures. The quality of these Sb-Ge-S amorphous thin films gives them high potential for the chalcogenide optical waveguide and device applications.
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Published date: 2007
Organisations:
Optoelectronics Research Centre
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Local EPrints ID: 46896
URI: http://eprints.soton.ac.uk/id/eprint/46896
PURE UUID: 0b907eee-3758-4881-afd4-ca5d2ce4c5f0
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Date deposited: 23 Jul 2007
Last modified: 16 Mar 2024 03:46
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Author:
Chung-Che Huang
Author:
Kenton Knight
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