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Antimony germanium sulphide amorphous thin films fabricated by chemical vapour deposition

Antimony germanium sulphide amorphous thin films fabricated by chemical vapour deposition
Antimony germanium sulphide amorphous thin films fabricated by chemical vapour deposition
Antimony germanium sulphide (Sb-Ge-S) amorphous thin films have been directly fabricated on both silica on silicon and commercial glass substrates by means of chemical vapour deposition. These Sb-Ge-S films have been characterized by micro-Raman, scanning electron microscopy and energy dispersive X-ray analysis techniques. The analysis results for these amorphous films indicate the composition of Sb-Ge-S can be varied by changing the deposition temperatures. The quality of these Sb-Ge-S amorphous thin films gives them high potential for the chalcogenide optical waveguide and device applications.
1344-1347
Huang, Chung-Che
825f7447-6d02-48f6-b95a-fa33da71f106
Knight, Kenton
341c08b7-a6e5-4264-9d15-9c911840f615
Hewak, Daniel
87c80070-c101-4f7a-914f-4cc3131e3db0
Huang, Chung-Che
825f7447-6d02-48f6-b95a-fa33da71f106
Knight, Kenton
341c08b7-a6e5-4264-9d15-9c911840f615
Hewak, Daniel
87c80070-c101-4f7a-914f-4cc3131e3db0

Huang, Chung-Che, Knight, Kenton and Hewak, Daniel (2007) Antimony germanium sulphide amorphous thin films fabricated by chemical vapour deposition. Optical Materials, 29 (11), 1344-1347. (doi:10.1016/j.optmat.2006.06.017).

Record type: Article

Abstract

Antimony germanium sulphide (Sb-Ge-S) amorphous thin films have been directly fabricated on both silica on silicon and commercial glass substrates by means of chemical vapour deposition. These Sb-Ge-S films have been characterized by micro-Raman, scanning electron microscopy and energy dispersive X-ray analysis techniques. The analysis results for these amorphous films indicate the composition of Sb-Ge-S can be varied by changing the deposition temperatures. The quality of these Sb-Ge-S amorphous thin films gives them high potential for the chalcogenide optical waveguide and device applications.

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Published date: 2007
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 46896
URI: http://eprints.soton.ac.uk/id/eprint/46896
PURE UUID: 0b907eee-3758-4881-afd4-ca5d2ce4c5f0
ORCID for Chung-Che Huang: ORCID iD orcid.org/0000-0003-3471-2463
ORCID for Daniel Hewak: ORCID iD orcid.org/0000-0002-2093-5773

Catalogue record

Date deposited: 23 Jul 2007
Last modified: 06 Jul 2021 01:40

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