Tunable index silicon nitride for CMOS photonics applications
Tunable index silicon nitride for CMOS photonics applications
We are demonstrating the use of Low temperature PECVD silicon nitride based materials used for applications ranging from non-linear functionalities in the C band, wavelength division multiplexing in the O band and post fabrication light based refractive index tuning for in-situ device trimming. These materials are demonstrated for waveguide ranging from 300 nm up to 1 micron in thickness with refractive indices varying between 1.9 and 2.55.
Gardes, Frederic Y.
7a49fc6d-dade-4099-b016-c60737cb5bb2
Domínguez Bucio, Thalía
83b57799-c566-473c-9b53-92e9c50b4287
Mastronardi, Lorenzo
5f46303c-8516-4038-bb3f-8720a3b28d25
De Paoli, Greta
eafc5c8a-e30a-40d1-a57e-0beb7f85af72
Jantzen, Senta L.
e532e171-8ea3-4576-8843-17d96a3995d4
Skandalos, Ilias
3daa2bbe-f6ee-4b6e-ac57-46df0c21c732
Milošević, Milan M.
b28da945-84a5-4317-8896-6d9ea6a69589
Vitali, Valerio
4a0d9710-5d64-4703-9554-86d71c4cb0f5
Faneca, Joaquin
03751f71-8e60-4d95-849b-a6f03b2e4051
Petropoulos, Periklis
522b02cc-9f3f-468e-bca5-e9f58cc9cad7
Jurado Romero, Francisco
549d1e5d-244c-4172-894c-26b7a04f9521
Luque-González, José Manuel
1da62e93-9f40-425e-8420-33f84a031505
Molina-Fernández, Íñigo
b71dcf74-f0e9-4cbe-8be1-28edde61ef56
Halir, Robert
e3f8d90b-0067-4e1a-a6b1-0217c342dd55
Ortega-Moñux, Alejandro
e8cde80a-bdd2-4fcc-bc03-bd50c1054f45
Wangüemert-Pérez, J. G.
e47666bd-f999-42e2-a234-0745e356c30c
Melati, Daniele
d03ceb1d-6e17-4707-be46-9bb503002d4a
Schmid, Jens H.
de954bee-9975-423f-8e10-0d35a4759f02
Cheben, Pavel
ab8ffd13-bc5c-44cb-88ed-605e3c347848
Gardes, Frederic Y.
7a49fc6d-dade-4099-b016-c60737cb5bb2
Domínguez Bucio, Thalía
83b57799-c566-473c-9b53-92e9c50b4287
Mastronardi, Lorenzo
5f46303c-8516-4038-bb3f-8720a3b28d25
De Paoli, Greta
eafc5c8a-e30a-40d1-a57e-0beb7f85af72
Jantzen, Senta L.
e532e171-8ea3-4576-8843-17d96a3995d4
Skandalos, Ilias
3daa2bbe-f6ee-4b6e-ac57-46df0c21c732
Milošević, Milan M.
b28da945-84a5-4317-8896-6d9ea6a69589
Vitali, Valerio
4a0d9710-5d64-4703-9554-86d71c4cb0f5
Faneca, Joaquin
03751f71-8e60-4d95-849b-a6f03b2e4051
Petropoulos, Periklis
522b02cc-9f3f-468e-bca5-e9f58cc9cad7
Jurado Romero, Francisco
549d1e5d-244c-4172-894c-26b7a04f9521
Luque-González, José Manuel
1da62e93-9f40-425e-8420-33f84a031505
Molina-Fernández, Íñigo
b71dcf74-f0e9-4cbe-8be1-28edde61ef56
Halir, Robert
e3f8d90b-0067-4e1a-a6b1-0217c342dd55
Ortega-Moñux, Alejandro
e8cde80a-bdd2-4fcc-bc03-bd50c1054f45
Wangüemert-Pérez, J. G.
e47666bd-f999-42e2-a234-0745e356c30c
Melati, Daniele
d03ceb1d-6e17-4707-be46-9bb503002d4a
Schmid, Jens H.
de954bee-9975-423f-8e10-0d35a4759f02
Cheben, Pavel
ab8ffd13-bc5c-44cb-88ed-605e3c347848
Gardes, Frederic Y., Domínguez Bucio, Thalía, Mastronardi, Lorenzo, De Paoli, Greta, Jantzen, Senta L., Skandalos, Ilias, Milošević, Milan M., Vitali, Valerio, Faneca, Joaquin, Petropoulos, Periklis, Jurado Romero, Francisco, Luque-González, José Manuel, Molina-Fernández, Íñigo, Halir, Robert, Ortega-Moñux, Alejandro, Wangüemert-Pérez, J. G., Melati, Daniele, Schmid, Jens H. and Cheben, Pavel
(2021)
Tunable index silicon nitride for CMOS photonics applications.
García-Blanco, Sonia M. and Cheben, Pavel
(eds.)
In Integrated Optics: Devices, Materials, and Technologies XXV.
vol. 11689,
SPIE..
(doi:10.1117/12.2578387).
Record type:
Conference or Workshop Item
(Paper)
Abstract
We are demonstrating the use of Low temperature PECVD silicon nitride based materials used for applications ranging from non-linear functionalities in the C band, wavelength division multiplexing in the O band and post fabrication light based refractive index tuning for in-situ device trimming. These materials are demonstrated for waveguide ranging from 300 nm up to 1 micron in thickness with refractive indices varying between 1.9 and 2.55.
This record has no associated files available for download.
More information
e-pub ahead of print date: 5 March 2021
Identifiers
Local EPrints ID: 470672
URI: http://eprints.soton.ac.uk/id/eprint/470672
ISSN: 1996-756X
PURE UUID: 673612a3-4511-453d-bc41-c6a205f43ab4
Catalogue record
Date deposited: 17 Oct 2022 16:59
Last modified: 17 Mar 2024 03:52
Export record
Altmetrics
Contributors
Author:
Lorenzo Mastronardi
Author:
Greta De Paoli
Author:
Senta L. Jantzen
Author:
Milan M. Milošević
Author:
Valerio Vitali
Author:
Joaquin Faneca
Author:
Francisco Jurado Romero
Author:
José Manuel Luque-González
Author:
Íñigo Molina-Fernández
Author:
Robert Halir
Author:
Alejandro Ortega-Moñux
Author:
J. G. Wangüemert-Pérez
Author:
Daniele Melati
Author:
Jens H. Schmid
Author:
Pavel Cheben
Editor:
Sonia M. García-Blanco
Editor:
Pavel Cheben
Download statistics
Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.
View more statistics