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Tunable index silicon nitride for CMOS photonics applications

Tunable index silicon nitride for CMOS photonics applications
Tunable index silicon nitride for CMOS photonics applications
We are demonstrating the use of Low temperature PECVD silicon nitride based materials used for applications ranging from non-linear functionalities in the C band, wavelength division multiplexing in the O band and post fabrication light based refractive index tuning for in-situ device trimming. These materials are demonstrated for waveguide ranging from 300 nm up to 1 micron in thickness with refractive indices varying between 1.9 and 2.55.
1996-756X
SPIE
Gardes, Frederic Y.
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Domínguez Bucio, Thalía
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Mastronardi, Lorenzo
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De Paoli, Greta
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Jantzen, Senta L.
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Skandalos, Ilias
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Milošević, Milan M.
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Vitali, Valerio
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Faneca, Joaquin
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Petropoulos, Periklis
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Jurado Romero, Francisco
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Luque-González, José Manuel
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Molina-Fernández, Íñigo
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Halir, Robert
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Ortega-Moñux, Alejandro
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Wangüemert-Pérez, J. G.
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Melati, Daniele
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Schmid, Jens H.
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Cheben, Pavel
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García-Blanco, Sonia M.
Cheben, Pavel
Gardes, Frederic Y.
7a49fc6d-dade-4099-b016-c60737cb5bb2
Domínguez Bucio, Thalía
83b57799-c566-473c-9b53-92e9c50b4287
Mastronardi, Lorenzo
5f46303c-8516-4038-bb3f-8720a3b28d25
De Paoli, Greta
eafc5c8a-e30a-40d1-a57e-0beb7f85af72
Jantzen, Senta L.
e532e171-8ea3-4576-8843-17d96a3995d4
Skandalos, Ilias
3daa2bbe-f6ee-4b6e-ac57-46df0c21c732
Milošević, Milan M.
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Vitali, Valerio
4a0d9710-5d64-4703-9554-86d71c4cb0f5
Faneca, Joaquin
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Petropoulos, Periklis
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Jurado Romero, Francisco
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Luque-González, José Manuel
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Molina-Fernández, Íñigo
b71dcf74-f0e9-4cbe-8be1-28edde61ef56
Halir, Robert
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Ortega-Moñux, Alejandro
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Wangüemert-Pérez, J. G.
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Melati, Daniele
d03ceb1d-6e17-4707-be46-9bb503002d4a
Schmid, Jens H.
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Cheben, Pavel
ab8ffd13-bc5c-44cb-88ed-605e3c347848
García-Blanco, Sonia M.
Cheben, Pavel

Gardes, Frederic Y., Domínguez Bucio, Thalía, Mastronardi, Lorenzo, De Paoli, Greta, Jantzen, Senta L., Skandalos, Ilias, Milošević, Milan M., Vitali, Valerio, Faneca, Joaquin, Petropoulos, Periklis, Jurado Romero, Francisco, Luque-González, José Manuel, Molina-Fernández, Íñigo, Halir, Robert, Ortega-Moñux, Alejandro, Wangüemert-Pérez, J. G., Melati, Daniele, Schmid, Jens H. and Cheben, Pavel (2021) Tunable index silicon nitride for CMOS photonics applications. García-Blanco, Sonia M. and Cheben, Pavel (eds.) In Integrated Optics: Devices, Materials, and Technologies XXV. vol. 11689, SPIE.. (doi:10.1117/12.2578387).

Record type: Conference or Workshop Item (Paper)

Abstract

We are demonstrating the use of Low temperature PECVD silicon nitride based materials used for applications ranging from non-linear functionalities in the C band, wavelength division multiplexing in the O band and post fabrication light based refractive index tuning for in-situ device trimming. These materials are demonstrated for waveguide ranging from 300 nm up to 1 micron in thickness with refractive indices varying between 1.9 and 2.55.

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More information

e-pub ahead of print date: 5 March 2021

Identifiers

Local EPrints ID: 470672
URI: http://eprints.soton.ac.uk/id/eprint/470672
ISSN: 1996-756X
PURE UUID: 673612a3-4511-453d-bc41-c6a205f43ab4
ORCID for Frederic Y. Gardes: ORCID iD orcid.org/0000-0003-1400-3272
ORCID for Thalía Domínguez Bucio: ORCID iD orcid.org/0000-0002-3664-1403
ORCID for Lorenzo Mastronardi: ORCID iD orcid.org/0000-0003-1489-2778
ORCID for Senta L. Jantzen: ORCID iD orcid.org/0000-0003-2646-7293
ORCID for Periklis Petropoulos: ORCID iD orcid.org/0000-0002-1576-8034

Catalogue record

Date deposited: 17 Oct 2022 16:59
Last modified: 17 Mar 2024 03:52

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Contributors

Author: Lorenzo Mastronardi ORCID iD
Author: Greta De Paoli
Author: Senta L. Jantzen ORCID iD
Author: Ilias Skandalos
Author: Milan M. Milošević
Author: Valerio Vitali
Author: Joaquin Faneca
Author: Francisco Jurado Romero
Author: José Manuel Luque-González
Author: Íñigo Molina-Fernández
Author: Robert Halir
Author: Alejandro Ortega-Moñux
Author: J. G. Wangüemert-Pérez
Author: Daniele Melati
Author: Jens H. Schmid
Author: Pavel Cheben
Editor: Sonia M. García-Blanco
Editor: Pavel Cheben

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