Low-loss silicon rectangular waveguides fabricated by anisotoropic wet etching for roughness reduction
Low-loss silicon rectangular waveguides fabricated by anisotoropic wet etching for roughness reduction
Simple fabrication of low-loss Si/SiO2 waveguides with a flat side wall is proposed. Waveguides oriented to the <11-2> direction on the Si (110) plane are fabricated by anisotropic wet etching and the lowest propagation loss is 1.4 dB/cm.
propagation loss, Si (110) plane, silicon photonics, Tetra-Methyl-Ammonium-Hydroxide, waveguide
90-91
Arimoto, Hideo
b88aab51-ad62-4127-9ca5-d86e3d714531
Husain, Muhammad K.
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Prasmusinto, Alyssa
ff88144e-545a-471d-b92c-f31064a33a44
Debnath, Kapil
aa01749d-524b-4464-b90a-af072e92a02f
Al-Attili, Abdelrahman
534a1c1f-3f8c-4a78-b71b-50c156e23373
Petra, Rafidah
82dc1d3d-9f9e-4cd9-832f-9d7f1a36fcc6
Chong, Harold M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139
Saito, Shinichi
14a5d20b-055e-4f48-9dda-267e88bd3fdc
23 October 2015
Arimoto, Hideo
b88aab51-ad62-4127-9ca5-d86e3d714531
Husain, Muhammad K.
92db1f76-6760-4cf2-8e30-5d4a602fe15b
Prasmusinto, Alyssa
ff88144e-545a-471d-b92c-f31064a33a44
Debnath, Kapil
aa01749d-524b-4464-b90a-af072e92a02f
Al-Attili, Abdelrahman
534a1c1f-3f8c-4a78-b71b-50c156e23373
Petra, Rafidah
82dc1d3d-9f9e-4cd9-832f-9d7f1a36fcc6
Chong, Harold M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139
Saito, Shinichi
14a5d20b-055e-4f48-9dda-267e88bd3fdc
Arimoto, Hideo, Husain, Muhammad K., Prasmusinto, Alyssa, Debnath, Kapil, Al-Attili, Abdelrahman, Petra, Rafidah, Chong, Harold M.H., Reed, Graham T. and Saito, Shinichi
(2015)
Low-loss silicon rectangular waveguides fabricated by anisotoropic wet etching for roughness reduction.
In 2015 IEEE 12th International Conference on Group IV Photonics, GFP 2015.
vol. 2015-October,
IEEE.
.
(doi:10.1109/Group4.2015.7305962).
Record type:
Conference or Workshop Item
(Paper)
Abstract
Simple fabrication of low-loss Si/SiO2 waveguides with a flat side wall is proposed. Waveguides oriented to the <11-2> direction on the Si (110) plane are fabricated by anisotropic wet etching and the lowest propagation loss is 1.4 dB/cm.
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More information
Published date: 23 October 2015
Additional Information:
Funding Information: This work is supported by EPSRC Standard Grant (EP/MO09416/1). EPSRC Manufacturing Fellowship (EP/MO08975/1), EU FP7 Marie-Curie Сarrier-Integration-Grant (PCIG13-GA-201 3-618116). and Hitachi. Reed is a Royal Society Wolfson Research Merit Award holder. He is grateful to the Wolfson Foundation and the Royal Society for funding of the award.
Venue - Dates:
12th IEEE International Conference on Group IV Photonics, GFP 2015, , Vancouver, Canada, 2015-08-26 - 2015-08-28
Keywords:
propagation loss, Si (110) plane, silicon photonics, Tetra-Methyl-Ammonium-Hydroxide, waveguide
Identifiers
Local EPrints ID: 473384
URI: http://eprints.soton.ac.uk/id/eprint/473384
ISSN: 1949-2081
PURE UUID: cdba6445-bf6b-4612-9b8e-18b38a423ca2
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Date deposited: 17 Jan 2023 17:37
Last modified: 18 Mar 2024 03:23
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Contributors
Author:
Hideo Arimoto
Author:
Muhammad K. Husain
Author:
Alyssa Prasmusinto
Author:
Kapil Debnath
Author:
Abdelrahman Al-Attili
Author:
Rafidah Petra
Author:
Harold M.H. Chong
Author:
Shinichi Saito
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