Amorphous germanium waveguides for medical diagnostics using mid-infrared spectroscopy
Amorphous germanium waveguides for medical diagnostics using mid-infrared spectroscopy
Molecules have ‘fingerprint’ absorptions in the mid-infrared, enabling their identification via infrared spectroscopy. For applications beyond the lab, such as medical diagnosis, fully integrated mid-infrared spectroscopy on chip would be ideal. Germanium offers low absorption in the mid-IR, making it an ideal candidate for waveguides for mid-IR spectroscopy via the evanescent field. Amorphous germanium could offer a low-cost fabrication route; our work compares methods to deposit amorphous germanium films via RF sputtering, e-beam evaporation and plasma-enhanced chemical vapour deposition (PECVD). In addition to standard germanium waveguides produced by etching a germanium film, an alternative manufacturing method is proposed, where silicon is etched to form pedestals, followed by deposition of amorphous germanium to produce waveguides. Pedestal waveguides offer potential for single-mode operation across a broad wavelength range, making them a strong candidate for spectroscopy applications.
Osborne, Eleanor
e4b069c7-c295-45d2-a802-12a35f4fc9ad
Veluthandath, Aneesh Vincent
6a183413-e10f-4374-bc64-a33bf7fd9cfa
Ahmed, Waseem
bd8069b9-786f-4dd1-b3f0-cf94d828a3b2
Boonsit, Sirawit
adcc0726-5231-443c-ac1f-3ef222711d80
Mourgelas, Vasileios
7f9f5519-f86c-4c96-8a5d-a97c0ec9fdb5
Wilkinson, James S.
73483cf3-d9f2-4688-9b09-1c84257884ca
Murugan, Ganapathy Senthil
a867686e-0535-46cc-ad85-c2342086b25b
17 March 2023
Osborne, Eleanor
e4b069c7-c295-45d2-a802-12a35f4fc9ad
Veluthandath, Aneesh Vincent
6a183413-e10f-4374-bc64-a33bf7fd9cfa
Ahmed, Waseem
bd8069b9-786f-4dd1-b3f0-cf94d828a3b2
Boonsit, Sirawit
adcc0726-5231-443c-ac1f-3ef222711d80
Mourgelas, Vasileios
7f9f5519-f86c-4c96-8a5d-a97c0ec9fdb5
Wilkinson, James S.
73483cf3-d9f2-4688-9b09-1c84257884ca
Murugan, Ganapathy Senthil
a867686e-0535-46cc-ad85-c2342086b25b
Osborne, Eleanor, Veluthandath, Aneesh Vincent, Ahmed, Waseem, Boonsit, Sirawit, Mourgelas, Vasileios, Wilkinson, James S. and Murugan, Ganapathy Senthil
(2023)
Amorphous germanium waveguides for medical diagnostics using mid-infrared spectroscopy.
SPIE Photonics West, , San Francisco, United States.
28 Jan - 02 Feb 2023.
6 pp
.
(doi:10.1117/12.2648868).
Record type:
Conference or Workshop Item
(Poster)
Abstract
Molecules have ‘fingerprint’ absorptions in the mid-infrared, enabling their identification via infrared spectroscopy. For applications beyond the lab, such as medical diagnosis, fully integrated mid-infrared spectroscopy on chip would be ideal. Germanium offers low absorption in the mid-IR, making it an ideal candidate for waveguides for mid-IR spectroscopy via the evanescent field. Amorphous germanium could offer a low-cost fabrication route; our work compares methods to deposit amorphous germanium films via RF sputtering, e-beam evaporation and plasma-enhanced chemical vapour deposition (PECVD). In addition to standard germanium waveguides produced by etching a germanium film, an alternative manufacturing method is proposed, where silicon is etched to form pedestals, followed by deposition of amorphous germanium to produce waveguides. Pedestal waveguides offer potential for single-mode operation across a broad wavelength range, making them a strong candidate for spectroscopy applications.
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e-pub ahead of print date: 1 February 2023
Published date: 17 March 2023
Venue - Dates:
SPIE Photonics West, , San Francisco, United States, 2023-01-28 - 2023-02-02
Identifiers
Local EPrints ID: 475233
URI: http://eprints.soton.ac.uk/id/eprint/475233
PURE UUID: 97791464-df3d-4652-ac85-9da977d8b79d
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Date deposited: 14 Mar 2023 17:46
Last modified: 12 Mar 2026 03:15
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