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Deeply sub-wavelength 2D optical metrology with superoscillatory light

Deeply sub-wavelength 2D optical metrology with superoscillatory light
Deeply sub-wavelength 2D optical metrology with superoscillatory light
We demonstrate optical metrology for two-dimensional sub-wavelength objects with resolution beyond λ/50 via deep learning-enabled analysis of light scattering from target objects illuminated by the phase singularity of superoscillatory structured light.
So, Jinkyu
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Wang, Yu
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Chan, Eng Aik
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Rendon-Barraza, Carolina
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Wang, Benquan
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Adamo, Giorgio
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Plum, Eric
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MacDonald, Kevin F.
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Ou, Jun-Yu
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Zheludev, Nikolai
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So, Jinkyu
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Wang, Yu
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Chan, Eng Aik
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Rendon-Barraza, Carolina
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Wang, Benquan
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Adamo, Giorgio
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Plum, Eric
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MacDonald, Kevin F.
76c84116-aad1-4973-b917-7ca63935dba5
Ou, Jun-Yu
3fb703e3-b222-46d2-b4ee-75f296d9d64d
Zheludev, Nikolai
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So, Jinkyu, Wang, Yu, Chan, Eng Aik, Rendon-Barraza, Carolina, Wang, Benquan, Adamo, Giorgio, Plum, Eric, MacDonald, Kevin F., Ou, Jun-Yu and Zheludev, Nikolai (2023) Deeply sub-wavelength 2D optical metrology with superoscillatory light. 2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference, International Congress Centre Munich, Munich, Germany. 26 - 30 Jun 2023.

Record type: Conference or Workshop Item (Poster)

Abstract

We demonstrate optical metrology for two-dimensional sub-wavelength objects with resolution beyond λ/50 via deep learning-enabled analysis of light scattering from target objects illuminated by the phase singularity of superoscillatory structured light.

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CLEO-europe - ellipse 2D nanometrology - Accepted Manuscript
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More information

Published date: 26 June 2023
Venue - Dates: 2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference, International Congress Centre Munich, Munich, Germany, 2023-06-26 - 2023-06-30
Learn more about Zepler Institute for Photonics and Nanoelectronics research Learn more about Zepler Institute for Photonics and Nanoelectronics research

Identifiers

Local EPrints ID: 476853
URI: http://eprints.soton.ac.uk/id/eprint/476853
PURE UUID: 3015299a-9da7-4a01-8567-b78d762d2290
ORCID for Eric Plum: ORCID iD orcid.org/0000-0002-1552-1840
ORCID for Kevin F. MacDonald: ORCID iD orcid.org/0000-0002-3877-2976
ORCID for Jun-Yu Ou: ORCID iD orcid.org/0000-0001-8028-6130
ORCID for Nikolai Zheludev: ORCID iD orcid.org/0000-0002-1013-6636

Catalogue record

Date deposited: 17 May 2023 17:07
Last modified: 16 Apr 2024 04:01

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Contributors

Author: Jinkyu So
Author: Yu Wang
Author: Eng Aik Chan
Author: Carolina Rendon-Barraza
Author: Benquan Wang
Author: Giorgio Adamo
Author: Eric Plum ORCID iD
Author: Kevin F. MacDonald ORCID iD
Author: Jun-Yu Ou ORCID iD
Author: Nikolai Zheludev ORCID iD

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