READ ME File of DATASET for "Silicon Nitride Integrated Optical Phased Array Devices, Applications and Systems" Dataset DOI: https://doi.org/10.5258/SOTON/D2665 ReadMe Author: Stefan-Tudor Ilie, University of Southampton Contact: sti1f23@soton.ac.uk This dataset supports the thesis: Stefan-Tudor Ilie Silicon Nitride Integrated Optical Phased Array Devices, Applications and Systems #################### Description: The file 'Dataset_STILIE_OPA.zip' contains raw images, simulations, measurements presented in the thesis entitled "Silicon Nitride Integrated Optical Phased Array Devices, Applications and Systems" by Stefan-Tudor Ilie. 1) Chapter by chapter dataset associated with figures represented 2) Misc script folder that contains data processing scritps used throughout the thesis 3) Raw IR images shows images taken using the near-IR camera within the lab for near-field and far-field measurements of optical phased arrays 4) Raw Optical Measurements of the devices measured throughout the thesis which stand at the base of all the information derived in this doctoral thesis, each labeled based on experiment 5) Raw SEM images of devices taken using the tools and equipment in the Southampton Nanofabrication Cleanrooms ######################################### Geographic location of data collection: University of Southampton, UK Date of data collection 2018-09-28 to 2022-12-10 Dataset available under a CC BY 4.0 licence Publisher: University of Southampton, U.K. Date: June 2023