Germanium implanted Bragg gratings in silicon on insulator waveguides
Germanium implanted Bragg gratings in silicon on insulator waveguides
Integrated Bragg gratings are an interesting candidate for waveguide coupling, telecommunication applications, and for the fabrication of integrated photonic sensors. These devices have a high potential for optical integration and are compatible with CMOS processing techniques if compared to their optical fibre counterpart. In this work we present design, fabrication, and testing of Germanium ion implanted Bragg gratings in silicon on insulator (SOI). A periodic refractive index modulation is produced in a 1μm wide SOI rib waveguide by implanting Germanium ions through an SiO2 hardmask. The implantation conditions have been analysed by 3D ion implantation modelling and the induced refractive index change has been investigated on implanted samples by Rutherford Backscattering Spectroscopy (RBS) and ellipsometry analysis. An extinction ratio of up to 30dB in transmission, around the 1.55μm wavelength, has been demonstrated for Germanium implanted gratings on SOI waveguides.
Bragg gratings, Defect engineering, Optical filters, Silicon photonics
Loiacono, Renzo
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Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139
Gwilliam, Russell
05728edb-27e0-4939-8b23-5d76f33786d6
Mashanovich, Goran Z.
c806e262-af80-4836-b96f-319425060051
O'Faolain, Liam
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Krauss, Thomas
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Lulli, Giorgio
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Jeynes, Chris
8ea089ab-2b7b-4d09-a8b7-fe0efa22913e
Jones, Richard
32519775-f1f2-4799-a910-9f52614f7032
27 January 2010
Loiacono, Renzo
bd4e12f9-9adc-4d25-9a7b-d3a4f1da3735
Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139
Gwilliam, Russell
05728edb-27e0-4939-8b23-5d76f33786d6
Mashanovich, Goran Z.
c806e262-af80-4836-b96f-319425060051
O'Faolain, Liam
b9696b63-9c51-4745-83c5-131d48e782e8
Krauss, Thomas
05d41852-08ae-4e6c-a334-a21104e38c9e
Lulli, Giorgio
b2b47358-3484-4509-86b8-f703cdf80f02
Jeynes, Chris
8ea089ab-2b7b-4d09-a8b7-fe0efa22913e
Jones, Richard
32519775-f1f2-4799-a910-9f52614f7032
Loiacono, Renzo, Reed, Graham T., Gwilliam, Russell, Mashanovich, Goran Z., O'Faolain, Liam, Krauss, Thomas, Lulli, Giorgio, Jeynes, Chris and Jones, Richard
(2010)
Germanium implanted Bragg gratings in silicon on insulator waveguides.
Kubby, Joel A. and Reed, Graham T.
(eds.)
In Silicon Photonics V.
vol. 7606,
SPIE.
8 pp
.
(doi:10.1117/12.839502).
Record type:
Conference or Workshop Item
(Paper)
Abstract
Integrated Bragg gratings are an interesting candidate for waveguide coupling, telecommunication applications, and for the fabrication of integrated photonic sensors. These devices have a high potential for optical integration and are compatible with CMOS processing techniques if compared to their optical fibre counterpart. In this work we present design, fabrication, and testing of Germanium ion implanted Bragg gratings in silicon on insulator (SOI). A periodic refractive index modulation is produced in a 1μm wide SOI rib waveguide by implanting Germanium ions through an SiO2 hardmask. The implantation conditions have been analysed by 3D ion implantation modelling and the induced refractive index change has been investigated on implanted samples by Rutherford Backscattering Spectroscopy (RBS) and ellipsometry analysis. An extinction ratio of up to 30dB in transmission, around the 1.55μm wavelength, has been demonstrated for Germanium implanted gratings on SOI waveguides.
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More information
Published date: 27 January 2010
Venue - Dates:
Silicon Photonics V, , San Francisco, CA, United States, 2010-01-24 - 2010-01-27
Keywords:
Bragg gratings, Defect engineering, Optical filters, Silicon photonics
Identifiers
Local EPrints ID: 481835
URI: http://eprints.soton.ac.uk/id/eprint/481835
ISSN: 0277-786X
PURE UUID: fd438b00-7220-4f6d-b27c-82afc9aef3ef
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Date deposited: 11 Sep 2023 16:36
Last modified: 29 Oct 2024 02:45
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Contributors
Author:
Renzo Loiacono
Author:
Graham T. Reed
Author:
Russell Gwilliam
Author:
Goran Z. Mashanovich
Author:
Liam O'Faolain
Author:
Thomas Krauss
Author:
Giorgio Lulli
Author:
Chris Jeynes
Author:
Richard Jones
Editor:
Joel A. Kubby
Editor:
Graham T. Reed
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