High speed silicon optical modulator with self-aligned fabrication process

Thomson, D.J., Gardes, F.Y., Reed, G.T. and Fedeli, J. M (2010) High speed silicon optical modulator with self-aligned fabrication process. In Proceedings of the 7th IEEE International Conference on Group IV Photonics, GFP 2010. IEEE. pp. 81-83 . (doi:10.1109/GROUP4.2010.5643421).

Abstract

Electronic and photonic devices formed using self-aligned processes are attractive for reducing performance variations and increasing yield. In this paper a novel high speed silicon optical modulator which has self-aligned pn junction formation is introduced.

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Contributors

Author: F.Y. Gardes

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