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Low temperature annealing for vanadium dioxide in photonic integrated circuits

Low temperature annealing for vanadium dioxide in photonic integrated circuits
Low temperature annealing for vanadium dioxide in photonic integrated circuits
We show at the annealing temperature of vanadium dioxide (VO2) fabricated using atomic layer deposition can be suppressed to 300 °C, significantly improving the compatibility of VO2 with photonic integrated circuits.
Du, Yuxin
c7d40636-5d75-47cf-bf22-f60d42484c3e
Sun, Kai
b7c648a3-7be8-4613-9d4d-1bf937fb487b
Zheng, Zihang
e6e6d348-ff52-4505-b20c-8ab947456061
De Groot, Kees
92cd2e02-fcc4-43da-8816-c86f966be90c
Fang, Xu
96b4b212-496b-4d68-82a4-06df70f94a86
Du, Yuxin
c7d40636-5d75-47cf-bf22-f60d42484c3e
Sun, Kai
b7c648a3-7be8-4613-9d4d-1bf937fb487b
Zheng, Zihang
e6e6d348-ff52-4505-b20c-8ab947456061
De Groot, Kees
92cd2e02-fcc4-43da-8816-c86f966be90c
Fang, Xu
96b4b212-496b-4d68-82a4-06df70f94a86

Du, Yuxin, Sun, Kai, Zheng, Zihang, De Groot, Kees and Fang, Xu (2023) Low temperature annealing for vanadium dioxide in photonic integrated circuits. The 84th JSAP Autumn Meeting 2023, Kumamoto, Japan. 19 - 23 Sep 2023. 1 pp .

Record type: Conference or Workshop Item (Paper)

Abstract

We show at the annealing temperature of vanadium dioxide (VO2) fabricated using atomic layer deposition can be suppressed to 300 °C, significantly improving the compatibility of VO2 with photonic integrated circuits.

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Low temperature annealing for vanadium dioxide in photonic integrated circuits - Accepted Manuscript
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Published date: 19 September 2023
Venue - Dates: The 84th JSAP Autumn Meeting 2023, Kumamoto, Japan, 2023-09-19 - 2023-09-23
Related URLs:
Learn more about Institute for Life Sciences research Learn more about School of Electronics and Computer Science research Learn more about Sustainable Electronic Technologies research

Identifiers

Local EPrints ID: 483594
URI: http://eprints.soton.ac.uk/id/eprint/483594
PURE UUID: d837bdd4-30d6-4635-97e1-5272c1f965f9
ORCID for Kai Sun: ORCID iD orcid.org/0000-0001-6807-6253
ORCID for Kees De Groot: ORCID iD orcid.org/0000-0002-3850-7101
ORCID for Xu Fang: ORCID iD orcid.org/0000-0003-1735-2654

Catalogue record

Date deposited: 02 Nov 2023 05:37
Last modified: 15 Jun 2024 01:42

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Contributors

Author: Yuxin Du
Author: Kai Sun ORCID iD
Author: Zihang Zheng
Author: Kees De Groot ORCID iD
Author: Xu Fang ORCID iD

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