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Wafer-scale fabrication of infrared metalens using DUV lithography

Wafer-scale fabrication of infrared metalens using DUV lithography
Wafer-scale fabrication of infrared metalens using DUV lithography
Sun, Kai
b7c648a3-7be8-4613-9d4d-1bf937fb487b
Yan, Xingzhao
e1f3f636-74e4-42d5-81c7-04feec2b85ba
Sun, Chuang
aecdd672-871a-4f6b-91db-ed98292addf2
Ou, Jun-Yu
3fb703e3-b222-46d2-b4ee-75f296d9d64d
Muskens, Otto
2284101a-f9ef-4d79-8951-a6cda5bfc7f9
Sun, Kai
b7c648a3-7be8-4613-9d4d-1bf937fb487b
Yan, Xingzhao
e1f3f636-74e4-42d5-81c7-04feec2b85ba
Sun, Chuang
aecdd672-871a-4f6b-91db-ed98292addf2
Ou, Jun-Yu
3fb703e3-b222-46d2-b4ee-75f296d9d64d
Muskens, Otto
2284101a-f9ef-4d79-8951-a6cda5bfc7f9

Sun, Kai, Yan, Xingzhao, Sun, Chuang, Ou, Jun-Yu and Muskens, Otto (2023) Wafer-scale fabrication of infrared metalens using DUV lithography. 49th International Conference on Micro and Nano Engineering, , Berlin, Germany. 25 Sep 2022 - 28 Sep 2023 .

Record type: Conference or Workshop Item (Poster)

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More information

Published date: 2023
Venue - Dates: 49th International Conference on Micro and Nano Engineering, , Berlin, Germany, 2022-09-25 - 2023-09-28
Related URLs:
Learn more about Institute for Life Sciences research Learn more about School of Electronics and Computer Science research Learn more about Zepler Institute for Photonics and Nanoelectronics research Learn more about Institute for Life Sciences research

Identifiers

Local EPrints ID: 484310
URI: http://eprints.soton.ac.uk/id/eprint/484310
PURE UUID: c8005909-70f3-49e3-a9de-7b842c67b863
ORCID for Kai Sun: ORCID iD orcid.org/0000-0001-6807-6253
ORCID for Chuang Sun: ORCID iD orcid.org/0000-0001-7024-1916
ORCID for Jun-Yu Ou: ORCID iD orcid.org/0000-0001-8028-6130
ORCID for Otto Muskens: ORCID iD orcid.org/0000-0003-0693-5504

Catalogue record

Date deposited: 15 Nov 2023 17:53
Last modified: 15 Jun 2024 01:42

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Contributors

Author: Kai Sun ORCID iD
Author: Xingzhao Yan
Author: Chuang Sun ORCID iD
Author: Jun-Yu Ou ORCID iD
Author: Otto Muskens ORCID iD

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