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A novel selective carrier modulation technique to form a planar metal oxide metasurface

A novel selective carrier modulation technique to form a planar metal oxide metasurface
A novel selective carrier modulation technique to form a planar metal oxide metasurface
Metasurface devices are conventionally fabricated by physically patterning the functional film. We demonstrated a novel fabrication technique to selectively modulate Al-doped ZnO carrier concentration of planar film and form a planar optical metasurface.
Optica Publishing Group
Sun, Kai
b7c648a3-7be8-4613-9d4d-1bf937fb487b
Xiao, Wei
20758ef4-698c-46e5-bb9b-a97db7340379
Zeimpekis, Ioannis
a2c354ec-3891-497c-adac-89b3a5d96af0
Simeoni, Mirko
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Urbani, Alessandro
d68233a3-a42d-4291-b938-9bf05daa22b2
Gaspari, Matteo
015ef61b-5f60-4584-a3d2-1bec5e6424df
Mengali, Sandro
e9ff1aee-6345-4414-af05-4d99308fdb73
Indiveri, Ivano
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Alpat, Behcet
a4055c2a-7b1f-4ad8-b33b-597b701cc81d
Kildebro, Lars
b303617b-43e5-44bd-b973-1fb8c710d1fa
Aizpurua, Javier
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Hewak, Dan
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de Groot, C.H. (Kees)
92cd2e02-fcc4-43da-8816-c86f966be90c
Muskens, Otto L.
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Sun, Kai
b7c648a3-7be8-4613-9d4d-1bf937fb487b
Xiao, Wei
20758ef4-698c-46e5-bb9b-a97db7340379
Zeimpekis, Ioannis
a2c354ec-3891-497c-adac-89b3a5d96af0
Simeoni, Mirko
8a24802d-647f-4fc1-b45e-87b922c9d990
Urbani, Alessandro
d68233a3-a42d-4291-b938-9bf05daa22b2
Gaspari, Matteo
015ef61b-5f60-4584-a3d2-1bec5e6424df
Mengali, Sandro
e9ff1aee-6345-4414-af05-4d99308fdb73
Indiveri, Ivano
5beeb569-d3e7-4f29-ac91-fec8459d94ef
Alpat, Behcet
a4055c2a-7b1f-4ad8-b33b-597b701cc81d
Kildebro, Lars
b303617b-43e5-44bd-b973-1fb8c710d1fa
Aizpurua, Javier
17705349-38e3-4089-adba-547d02449095
Hewak, Dan
87c80070-c101-4f7a-914f-4cc3131e3db0
de Groot, C.H. (Kees)
92cd2e02-fcc4-43da-8816-c86f966be90c
Muskens, Otto L.
2284101a-f9ef-4d79-8951-a6cda5bfc7f9

Sun, Kai, Xiao, Wei, Zeimpekis, Ioannis, Simeoni, Mirko, Urbani, Alessandro, Gaspari, Matteo, Mengali, Sandro, Indiveri, Ivano, Alpat, Behcet, Kildebro, Lars, Aizpurua, Javier, Hewak, Dan, de Groot, C.H. (Kees) and Muskens, Otto L. (2021) A novel selective carrier modulation technique to form a planar metal oxide metasurface. In OSA Optical Design and Fabrication 2021 (Flat Optics, Freeform, IODC, OFT). Optica Publishing Group.. (doi:10.1364/FLATOPTICS.2021.JTh4B.3).

Record type: Conference or Workshop Item (Paper)

Abstract

Metasurface devices are conventionally fabricated by physically patterning the functional film. We demonstrated a novel fabrication technique to selectively modulate Al-doped ZnO carrier concentration of planar film and form a planar optical metasurface.

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More information

Published date: 27 June 2021
Venue - Dates: OSA Optical Design and Fabrication Congress 2021, , Washington, D.C., United States, 2021-06-27 - 2021-07-01
Learn more about Institute for Life Sciences research Learn more about Institute for Life Sciences research Learn more about Sustainable Electronic Technologies research

Identifiers

Local EPrints ID: 484353
URI: http://eprints.soton.ac.uk/id/eprint/484353
DOI: doi:10.1364/FLATOPTICS.2021.JTh4B.3
PURE UUID: 59b79607-b8ea-4c46-96e2-367e2c3f8982
ORCID for Kai Sun: ORCID iD orcid.org/0000-0001-6807-6253
ORCID for Wei Xiao: ORCID iD orcid.org/0000-0002-3898-1110
ORCID for Ioannis Zeimpekis: ORCID iD orcid.org/0000-0002-7455-1599
ORCID for Dan Hewak: ORCID iD orcid.org/0000-0002-2093-5773
ORCID for C.H. (Kees) de Groot: ORCID iD orcid.org/0000-0002-3850-7101
ORCID for Otto L. Muskens: ORCID iD orcid.org/0000-0003-0693-5504

Catalogue record

Date deposited: 15 Nov 2023 18:25
Last modified: 21 Sep 2024 01:46

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Contributors

Author: Kai Sun ORCID iD
Author: Wei Xiao ORCID iD
Author: Ioannis Zeimpekis ORCID iD
Author: Mirko Simeoni
Author: Alessandro Urbani
Author: Matteo Gaspari
Author: Sandro Mengali
Author: Ivano Indiveri
Author: Behcet Alpat
Author: Lars Kildebro
Author: Javier Aizpurua
Author: Dan Hewak ORCID iD
Author: C.H. (Kees) de Groot ORCID iD
Author: Otto L. Muskens ORCID iD

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