The University of Southampton
University of Southampton Institutional Repository

Cohesive zone model for direct silicon wafer bonding

Kubair, D.V. and Spearing, S.M. (2007) Cohesive zone model for direct silicon wafer bonding Journal of Physics D: Applied Physics, 40, (10), pp. 3070-3076. (doi:10.1088/0022-3727/40/10/010).

Record type: Article

Abstract

Direct silicon wafer bonding and decohesion are simulated using a spectral scheme in conjunction with a rate-dependent cohesive model. The cohesive model is derived assuming the presence of a thin continuum liquid layer at the interface. Cohesive tractions due to the presence of a liquid meniscus always tend to reduce the separation distance between the wafers, thereby opposing debonding, while assisting the bonding process. In the absence of the rate-dependence effects the energy needed to bond a pair of wafers is equal to that needed to separate them. When rate-dependence is considered in the cohesive law, the experimentally observed asymmetry in the energetics can be explained. The derived cohesive model has the potential to form a bridge between experiments and a multiscale-modelling approach to understand the mechanics of wafer bonding.

Full text not available from this repository.

More information

Published date: 2007
Organisations: Engineering Mats & Surface Engineerg Gp

Identifiers

Local EPrints ID: 48539
URI: http://eprints.soton.ac.uk/id/eprint/48539
ISSN: 0022-3727
PURE UUID: 0d75ddce-5624-4110-bba7-b27b1811b49e

Catalogue record

Date deposited: 27 Sep 2007
Last modified: 17 Jul 2017 14:59

Export record

Altmetrics

Contributors

Author: D.V. Kubair
Author: S.M. Spearing

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×