The University of Southampton
University of Southampton Institutional Repository

Materials selection and design of microelectrothermal bimaterial actuators

Prasanna, S. and Spearing, S.M. (2007) Materials selection and design of microelectrothermal bimaterial actuators Journal of Microelectromechanical Systems, 16, (2), pp. 248-259. (doi:10.1109/JMEMS.2006.889528).

Record type: Article

Abstract

A common form of MEMS actuator is a thermally actuated bimaterial, which is easy to fabricate by surface micromachining and permits out of plane actuation, which is otherwise difficult to achieve. This paper presents an analytical framework for the design of such microelectrothermal bimaterial actuators. Mechanics relationships for a cantilever bimaterial strip subjected to a uniform temperature were applied to obtain expressions for performance metrics for the actuator, i.e., maximum work/volume, blocked (force) moment, and free-end (displacement) slope. Results from finite-element analysis and closed form relations agree well to within 1%. The optimal performance for a given pair of materials and the corresponding thickness ratio were determined. Contours of equal performance corresponding to commonly used substrates (e.g., Si, SiO2) were plotted in the domain of governing material properties (thermal expansion coefficient and Young's modulus) to identify candidate materials for further development. These results and the accompanying methodology provide a rational basis for comparing the suitability of "standard" materials for microelectrothermal actuators, as well as identifying materials that might be suitable for further research.

PDF 48542.pdf - Version of Record
Download (594kB)

More information

Published date: April 2007
Organisations: Engineering Mats & Surface Engineerg Gp

Identifiers

Local EPrints ID: 48542
URI: http://eprints.soton.ac.uk/id/eprint/48542
ISSN: 1057-7157
PURE UUID: 6399ea51-367c-402b-978f-be5856b47d95

Catalogue record

Date deposited: 27 Sep 2007
Last modified: 17 Jul 2017 14:59

Export record

Altmetrics

Contributors

Author: S. Prasanna
Author: S.M. Spearing

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×