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Low-cost polysilicon nanowires for chemical sensing based on top-down photolithograph and dry etch

Low-cost polysilicon nanowires for chemical sensing based on top-down photolithograph and dry etch
Low-cost polysilicon nanowires for chemical sensing based on top-down photolithograph and dry etch
Sun, Kai
b7c648a3-7be8-4613-9d4d-1bf937fb487b
Sun, Kai
b7c648a3-7be8-4613-9d4d-1bf937fb487b

Sun, Kai (2010) Low-cost polysilicon nanowires for chemical sensing based on top-down photolithograph and dry etch. NanoBioTech 2010, , Montreux, Switzerland. 15 - 17 Nov 2010.

Record type: Conference or Workshop Item (Poster)

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More information

Published date: 15 November 2010
Venue - Dates: NanoBioTech 2010, , Montreux, Switzerland, 2010-11-15 - 2010-11-17

Identifiers

Local EPrints ID: 485474
URI: http://eprints.soton.ac.uk/id/eprint/485474
PURE UUID: 9a423708-c7ff-47a8-b484-3e6f8202e659
ORCID for Kai Sun: ORCID iD orcid.org/0000-0001-6807-6253

Catalogue record

Date deposited: 07 Dec 2023 17:32
Last modified: 15 Jun 2024 01:42

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