A MEMS linear accelerator for levitated micro-objects
A MEMS linear accelerator for levitated micro-objects
In this work, the design, micro-fabrication, and characterization steps of a contactless linear accelerator is presented. The proposed design in principle can levitate conductive micro-objects and accelerate or move them over a predefined trajectory. The levitation is realized using electromagnetic induction generated by a changing AC field whereas the propulsion is achieved through electrostatic forces from a controlled DC source. This is the first time in literature that such a hybrid design is used to accomplish this idea. It has been experimentally shown that the proposed design can levitate 1 mm × 1 mm sized and 7 μm thick micro-objects to a maximum height of 75 μm and propel them forward continuously at a maximum average forward velocity of 3.6 mm/s.
15-23
Sari, Ibrahim
cdcb1265-4a94-4c5a-b8b1-f1ca7e6759d7
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
1 February 2015
Sari, Ibrahim
cdcb1265-4a94-4c5a-b8b1-f1ca7e6759d7
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
Sari, Ibrahim and Kraft, Michael
(2015)
A MEMS linear accelerator for levitated micro-objects.
Sensors and Actuators A: Physical, 222, .
(doi:10.1016/j.sna.2014.11.008).
Abstract
In this work, the design, micro-fabrication, and characterization steps of a contactless linear accelerator is presented. The proposed design in principle can levitate conductive micro-objects and accelerate or move them over a predefined trajectory. The levitation is realized using electromagnetic induction generated by a changing AC field whereas the propulsion is achieved through electrostatic forces from a controlled DC source. This is the first time in literature that such a hybrid design is used to accomplish this idea. It has been experimentally shown that the proposed design can levitate 1 mm × 1 mm sized and 7 μm thick micro-objects to a maximum height of 75 μm and propel them forward continuously at a maximum average forward velocity of 3.6 mm/s.
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Accepted/In Press date: 15 November 2014
e-pub ahead of print date: 22 November 2014
Published date: 1 February 2015
Identifiers
Local EPrints ID: 485769
URI: http://eprints.soton.ac.uk/id/eprint/485769
ISSN: 0924-4247
PURE UUID: 4efba092-dcb2-497e-8c06-5aaba95d1f27
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Date deposited: 18 Dec 2023 20:38
Last modified: 17 Mar 2024 06:28
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Author:
Ibrahim Sari
Author:
Michael Kraft
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