Yan, Jize, Seshia, Ashwin, Steeneken, Peter G. and van Beek, Joost T.M. (2006) A silicon MEMS bulk mode 'sandwich' resonator. In Proceedings of the 17th European Workshop on Micromachining, Micromechanics and Microsystems. pp. 217-220 .
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Published date: 2006
Venue - Dates:
17th workshop on Micromachining, Micromechanics and Microsystems, , Southampton, United Kingdom, 2006-09-03 - 2006-09-05
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Local EPrints ID: 486979
URI: http://eprints.soton.ac.uk/id/eprint/486979
PURE UUID: bf0ba2cb-da90-408d-aa7c-338af200fac1
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Date deposited: 09 Feb 2024 17:32
Last modified: 28 Feb 2024 02:55
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Contributors
Author:
Ashwin Seshia
Author:
Peter G. Steeneken
Author:
Joost T.M. van Beek
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