Narrow bandwidth single-resonator MEMS tuning fork filter
Narrow bandwidth single-resonator MEMS tuning fork filter
We present a solution for a fourth-order, narrow-bandwidth filter comprising of a single silicon tuning fork resonator driven using one electrode only. Voltage controlled electrical spring tuning is employed to match the primary and secondary modes of the resonator to achieve filter response. A narrow bandwidth single resonator MEMS tuning fork filter is demonstrated with a center frequency of 1.2866 MHz, a 3 dB-bandwidth of 0.0085% and a 1.5 dB ripple.
1366-1369
Yan, Jize
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Seshia, Ashwin A.
4389f1ed-603a-4fed-9ceb-6279102b0fad
Phan, Kim L.
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Steeneken, Peter G.
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van Beek, Joost T.M.
e98bccf5-feea-47aa-9854-ebc3db451da3
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, Ashwin A.
4389f1ed-603a-4fed-9ceb-6279102b0fad
Phan, Kim L.
4c9cec99-99a9-464d-acf1-c436ecf9f720
Steeneken, Peter G.
10f3735c-204b-4a7c-aa40-2a38f3e7ad2b
van Beek, Joost T.M.
e98bccf5-feea-47aa-9854-ebc3db451da3
Yan, Jize, Seshia, Ashwin A., Phan, Kim L., Steeneken, Peter G. and van Beek, Joost T.M.
(2007)
Narrow bandwidth single-resonator MEMS tuning fork filter.
In 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum.
IEEE.
.
(doi:10.1109/FREQ.2007.4319300).
Record type:
Conference or Workshop Item
(Paper)
Abstract
We present a solution for a fourth-order, narrow-bandwidth filter comprising of a single silicon tuning fork resonator driven using one electrode only. Voltage controlled electrical spring tuning is employed to match the primary and secondary modes of the resonator to achieve filter response. A narrow bandwidth single resonator MEMS tuning fork filter is demonstrated with a center frequency of 1.2866 MHz, a 3 dB-bandwidth of 0.0085% and a 1.5 dB ripple.
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e-pub ahead of print date: 1 October 2007
Venue - Dates:
2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum, , Geneva, Switzerland, 2007-05-29 - 2007-06-01
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Local EPrints ID: 486983
URI: http://eprints.soton.ac.uk/id/eprint/486983
PURE UUID: bff03676-710f-407b-bde3-caf88304eb4b
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Date deposited: 09 Feb 2024 17:32
Last modified: 18 Mar 2024 03:33
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Contributors
Author:
Ashwin A. Seshia
Author:
Kim L. Phan
Author:
Peter G. Steeneken
Author:
Joost T.M. van Beek
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