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Mechanical dicing of optical quality facets and waveguides in a silicon nitride platform

Mechanical dicing of optical quality facets and waveguides in a silicon nitride platform
Mechanical dicing of optical quality facets and waveguides in a silicon nitride platform
The authors report a ductile dicing process for manufacturing optical-quality facets in a multi-layered silicon nitride platform without the need for polishing. A surface roughness (Sa) of 1.5 nm was achieved. This technique was extended to fabricate ridge waveguides, and the results and characterization are reported.
micromachining, optical fabrication, photonics, sawing machines, surface roughness, waveguides
0013-5194
Gow, Paul C.
193394b1-fe2d-41de-a9aa-6de7e5925b18
Churchill, Glenn M.
5933a331-fba3-444b-8352-273112c3d6a6
Vitali, Valerio
4a0d9710-5d64-4703-9554-86d71c4cb0f5
Dominguez Bucio, Thalia
83b57799-c566-473c-9b53-92e9c50b4287
Gardes, Frederic Y.
7a49fc6d-dade-4099-b016-c60737cb5bb2
D'Souza, Matthew P.
9e6e1f39-1d57-4848-b4ac-5aafd7ff10df
Petropoulos, Periklis
522b02cc-9f3f-468e-bca5-e9f58cc9cad7
Gawith, Corin B.E.
926665c0-84c7-4a1d-ae19-ee6d7d14c43e
Gates, James C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Gow, Paul C.
193394b1-fe2d-41de-a9aa-6de7e5925b18
Churchill, Glenn M.
5933a331-fba3-444b-8352-273112c3d6a6
Vitali, Valerio
4a0d9710-5d64-4703-9554-86d71c4cb0f5
Dominguez Bucio, Thalia
83b57799-c566-473c-9b53-92e9c50b4287
Gardes, Frederic Y.
7a49fc6d-dade-4099-b016-c60737cb5bb2
D'Souza, Matthew P.
9e6e1f39-1d57-4848-b4ac-5aafd7ff10df
Petropoulos, Periklis
522b02cc-9f3f-468e-bca5-e9f58cc9cad7
Gawith, Corin B.E.
926665c0-84c7-4a1d-ae19-ee6d7d14c43e
Gates, James C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2

Gow, Paul C., Churchill, Glenn M., Vitali, Valerio, Dominguez Bucio, Thalia, Gardes, Frederic Y., D'Souza, Matthew P., Petropoulos, Periklis, Gawith, Corin B.E. and Gates, James C. (2024) Mechanical dicing of optical quality facets and waveguides in a silicon nitride platform. Electronics Letters, 60 (5), [e13138]. (doi:10.1049/ell2.13138).

Record type: Letter

Abstract

The authors report a ductile dicing process for manufacturing optical-quality facets in a multi-layered silicon nitride platform without the need for polishing. A surface roughness (Sa) of 1.5 nm was achieved. This technique was extended to fabricate ridge waveguides, and the results and characterization are reported.

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Electronics Letters - 2024 - Gow - Mechanical dicing of optical quality facets and waveguides in a silicon nitride platform - Version of Record
Available under License Creative Commons Attribution.
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Submitted date: 2023
Accepted/In Press date: 15 February 2024
Published date: March 2024
Additional Information: The authors would like to acknowledge the following funding sources: Innovate UK (50414); Engineering and Physical Sciences Research Council (EP/M013294/1, EP/T001062/1, EP/W024772/1); Royal Academy of Engineering Research Chair (RCSRF1718639). Publisher Copyright: © 2024 The Authors. Electronics Letters published by John Wiley & Sons Ltd on behalf of The Institution of Engineering and Technology.
Keywords: micromachining, optical fabrication, photonics, sawing machines, surface roughness, waveguides
Learn more about Zepler Institute for Photonics and Nanoelectronics research Learn more about Zepler Institute for Photonics and Nanoelectronics research

Identifiers

Local EPrints ID: 487747
URI: http://eprints.soton.ac.uk/id/eprint/487747
DOI: doi:10.1049/ell2.13138
ISSN: 0013-5194
PURE UUID: 8884ae83-28dc-4756-ab07-155964b30555
ORCID for Paul C. Gow: ORCID iD orcid.org/0000-0002-3247-9082
ORCID for Glenn M. Churchill: ORCID iD orcid.org/0000-0001-7621-7618
ORCID for Thalia Dominguez Bucio: ORCID iD orcid.org/0000-0002-3664-1403
ORCID for Frederic Y. Gardes: ORCID iD orcid.org/0000-0003-1400-3272
ORCID for Matthew P. D'Souza: ORCID iD orcid.org/0000-0002-0165-3244
ORCID for Periklis Petropoulos: ORCID iD orcid.org/0000-0002-1576-8034
ORCID for Corin B.E. Gawith: ORCID iD orcid.org/0000-0002-3502-3558
ORCID for James C. Gates: ORCID iD orcid.org/0000-0001-8671-5987

Catalogue record

Date deposited: 04 Mar 2024 17:43
Last modified: 16 May 2024 01:58

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Contributors

Author: Paul C. Gow ORCID iD
Author: Glenn M. Churchill ORCID iD
Author: Valerio Vitali
Author: Thalia Dominguez Bucio ORCID iD
Author: Frederic Y. Gardes ORCID iD
Author: Matthew P. D'Souza ORCID iD
Author: Periklis Petropoulos ORCID iD
Author: Corin B.E. Gawith ORCID iD
Author: James C. Gates ORCID iD

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