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Dataset supporting the publication "Mechanical dicing of optical quality facets and waveguides in a Silicon Nitride platform".

Dataset supporting the publication "Mechanical dicing of optical quality facets and waveguides in a Silicon Nitride platform".
Dataset supporting the publication "Mechanical dicing of optical quality facets and waveguides in a Silicon Nitride platform".
Dataset supporting the publication "Mechanical dicing of optical quality facets and waveguides in a Silicon Nitride platform". This dataset supports the publication: AUTHORS: Paul C Gow, Glenn M Churchill, Valerio Vitali, Thalia Dominguez Bucio, Frederic Y Gardes, Matthew P. D’Souza, Periklis Petropoulos, Corin B E Gawith and James C Gates TITLE: Mechanical dicing of optical quality facets and waveguides in a Silicon Nitride platform. JOURNAL: Electronics Letters PAPER DOI IF KNOWN: 10.1049/ell2.13138 This zipped dataset contains: "NCM_3_FAST_Topography_Forward 5.0x5.0" TIFF file of the topography of one of the machined Silicon Nitride facets measured using a Park Systems Atomis Force Microscope. "SirichSiN_300nmThickness_TOPWaveguide_TotalTransmissionLosses_meas1" Microsoft Excel file containing two tabs. "Overview" shows general information of the spectrum analyser used. "IL" shows wavelength data in column A, and Loss data in Column B.
University of Southampton
Gow, Paul
193394b1-fe2d-41de-a9aa-6de7e5925b18
Churchill, Glenn
5933a331-fba3-444b-8352-273112c3d6a6
Vitali, Valerio
a391f25d-3b6e-4e34-a106-36e62854a867
Dominguez Bucio, Thalia
b8b4e121-f09f-4ae0-8550-47bf2fd49da1
Gow, Paul
193394b1-fe2d-41de-a9aa-6de7e5925b18
Churchill, Glenn
5933a331-fba3-444b-8352-273112c3d6a6
Vitali, Valerio
a391f25d-3b6e-4e34-a106-36e62854a867
Dominguez Bucio, Thalia
b8b4e121-f09f-4ae0-8550-47bf2fd49da1

Gow, Paul (2023) Dataset supporting the publication "Mechanical dicing of optical quality facets and waveguides in a Silicon Nitride platform". University of Southampton doi:10.5258/SOTON/D2908 [Dataset]

Record type: Dataset

Abstract

Dataset supporting the publication "Mechanical dicing of optical quality facets and waveguides in a Silicon Nitride platform". This dataset supports the publication: AUTHORS: Paul C Gow, Glenn M Churchill, Valerio Vitali, Thalia Dominguez Bucio, Frederic Y Gardes, Matthew P. D’Souza, Periklis Petropoulos, Corin B E Gawith and James C Gates TITLE: Mechanical dicing of optical quality facets and waveguides in a Silicon Nitride platform. JOURNAL: Electronics Letters PAPER DOI IF KNOWN: 10.1049/ell2.13138 This zipped dataset contains: "NCM_3_FAST_Topography_Forward 5.0x5.0" TIFF file of the topography of one of the machined Silicon Nitride facets measured using a Park Systems Atomis Force Microscope. "SirichSiN_300nmThickness_TOPWaveguide_TotalTransmissionLosses_meas1" Microsoft Excel file containing two tabs. "Overview" shows general information of the spectrum analyser used. "IL" shows wavelength data in column A, and Loss data in Column B.

Text
README.txt - Dataset
Available under License Creative Commons Attribution.
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Data.zip - Dataset
Available under License Creative Commons Attribution.
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More information

Published date: 2023
Related URLs:
Learn more about Zepler Institute for Photonics and Nanoelectronics research

Identifiers

Local EPrints ID: 487866
URI: http://eprints.soton.ac.uk/id/eprint/487866
DOI: doi:10.5258/SOTON/D2908
PURE UUID: 9ab66412-3ce7-4014-b274-194dc9e9dfef
ORCID for Paul Gow: ORCID iD orcid.org/0000-0002-3247-9082
ORCID for Glenn Churchill: ORCID iD orcid.org/0000-0001-7621-7618

Catalogue record

Date deposited: 07 Mar 2024 17:41
Last modified: 08 Mar 2024 02:49

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Contributors

Creator: Paul Gow ORCID iD
Contributor: Glenn Churchill ORCID iD
Contributor: Valerio Vitali
Contributor: Thalia Dominguez Bucio

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