Dataset supporting the publication "Vertical Integration of KTN on SOI Wafer"
Dataset supporting the publication "Vertical Integration of KTN on SOI Wafer"
This dataset contains all the FIB-SEM images, experimental and simulation data used to generate the figures included in the main text of the publication "Vertical Integration of KTN on SOI Wafer" in Optics Express (2024) https://doi.org/10.1364/OE.525582
This dataset contain three main folders:
The first folder (experiment) contains all experimental data obtained from passive characterisation of the structures.
The second folder (simulation) contains simulation EME file and the final sweep results.
The third folder (images) contains the microscopic and FIB-SEM images.
The files are presented in excel files, JPG files for images and lsf, and lms files for simulations.
The data is accessible via CC BY license.
waveguides
University of Southampton
Chang, Tzu-Yun
ff72fe64-8c68-4481-8642-3bef30536f21
Thomson, David
17c1626c-2422-42c6-98e0-586ae220bcda
Ebert, Martin
1a8f1756-d724-4b44-8504-c01f8dc7aa50
Zhang, Weiwei
1a783f97-c5ac-49e9-a5a0-49b8b2efab36
Chang, Tzu-Yun
ff72fe64-8c68-4481-8642-3bef30536f21
Thomson, David
17c1626c-2422-42c6-98e0-586ae220bcda
Ebert, Martin
1a8f1756-d724-4b44-8504-c01f8dc7aa50
Zhang, Weiwei
1a783f97-c5ac-49e9-a5a0-49b8b2efab36
Chang, Tzu-Yun, Thomson, David, Ebert, Martin and Zhang, Weiwei
(2024)
Dataset supporting the publication "Vertical Integration of KTN on SOI Wafer".
University of Southampton
doi:10.5258/SOTON/D3031
[Dataset]
Abstract
This dataset contains all the FIB-SEM images, experimental and simulation data used to generate the figures included in the main text of the publication "Vertical Integration of KTN on SOI Wafer" in Optics Express (2024) https://doi.org/10.1364/OE.525582
This dataset contain three main folders:
The first folder (experiment) contains all experimental data obtained from passive characterisation of the structures.
The second folder (simulation) contains simulation EME file and the final sweep results.
The third folder (images) contains the microscopic and FIB-SEM images.
The files are presented in excel files, JPG files for images and lsf, and lms files for simulations.
The data is accessible via CC BY license.
Archive
Supplementary_data.zip
- Dataset
Text
D3031-README.txt
- Text
More information
Published date: 24 May 2024
Keywords:
waveguides
Identifiers
Local EPrints ID: 490435
URI: http://eprints.soton.ac.uk/id/eprint/490435
PURE UUID: 164a4c62-9a4e-4f45-8776-438a8325d922
Catalogue record
Date deposited: 28 May 2024 16:40
Last modified: 28 May 2024 16:40
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Contributors
Creator:
Tzu-Yun Chang
Creator:
David Thomson
Creator:
Martin Ebert
Creator:
Weiwei Zhang
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