A comparison of precision optical displacement sensors for the 3-D measurement of complex surface profiles. [In special issue: Eurosensors XX The 20th European conference on Solid-State Transducers - Eurosensors 2006, Eurosensors 20th Edition]
A comparison of precision optical displacement sensors for the 3-D measurement of complex surface profiles. [In special issue: Eurosensors XX The 20th European conference on Solid-State Transducers - Eurosensors 2006, Eurosensors 20th Edition]
Non-contact optical sensors, combined with a raster scanning system, can be used in surface metrology applications such as MEMS processing to build high-precision topological surface maps representing the surface profile. We compare three optical displacement sensors for the measurement of complex surfaces, focussing on early sound recordings, and recommend sensor selection based on parameters including measurement area, time and resolution.
non-contact metrology, optical displacement sensor, profilometer, sound recovery
2-11
Boltryk, Peter J.
8996b780-34c0-401d-b329-99e4f0e0f0ab
Hill, Martyn
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McBride, John W.
d9429c29-9361-4747-9ba3-376297cb8770
Nascè, Antony
838aa96e-ecc5-464c-ad50-55bdf73ab02f
10 March 2008
Boltryk, Peter J.
8996b780-34c0-401d-b329-99e4f0e0f0ab
Hill, Martyn
0cda65c8-a70f-476f-b126-d2c4460a253e
McBride, John W.
d9429c29-9361-4747-9ba3-376297cb8770
Nascè, Antony
838aa96e-ecc5-464c-ad50-55bdf73ab02f
Boltryk, Peter J., Hill, Martyn, McBride, John W. and Nascè, Antony
(2008)
A comparison of precision optical displacement sensors for the 3-D measurement of complex surface profiles. [In special issue: Eurosensors XX The 20th European conference on Solid-State Transducers - Eurosensors 2006, Eurosensors 20th Edition].
Sensors and Actuators A: Physical, 142 (1), .
(doi:10.1016/j.sna.2007.03.006).
Abstract
Non-contact optical sensors, combined with a raster scanning system, can be used in surface metrology applications such as MEMS processing to build high-precision topological surface maps representing the surface profile. We compare three optical displacement sensors for the measurement of complex surfaces, focussing on early sound recordings, and recommend sensor selection based on parameters including measurement area, time and resolution.
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e-pub ahead of print date: 14 March 2007
Published date: 10 March 2008
Keywords:
non-contact metrology, optical displacement sensor, profilometer, sound recovery
Identifiers
Local EPrints ID: 49060
URI: http://eprints.soton.ac.uk/id/eprint/49060
ISSN: 0924-4247
PURE UUID: 6c1b21dd-e7da-4a7c-bbb1-9fa8aceeedbf
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Date deposited: 25 Oct 2007
Last modified: 16 Mar 2024 02:41
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Contributors
Author:
Peter J. Boltryk
Author:
Antony Nascè
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