Boltryk, Peter J., Hill, Martyn, McBride, John W. and Nascè, Antony
A comparison of precision optical displacement sensors for the 3-D measurement of complex surface profiles. [In special issue: Eurosensors XX The 20th European conference on Solid-State Transducers - Eurosensors 2006, Eurosensors 20th Edition]
Sensors and Actuators A: Physical, 142, (1), . (doi:10.1016/j.sna.2007.03.006).
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Non-contact optical sensors, combined with a raster scanning system, can be used in surface metrology applications such as MEMS processing to build high-precision topological surface maps representing the surface profile. We compare three optical displacement sensors for the measurement of complex surfaces, focussing on early sound recordings, and recommend sensor selection based on parameters including measurement area, time and resolution.
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