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A comparison of precision optical displacement sensors for the 3-D measurement of complex surface profiles. [In special issue: Eurosensors XX The 20th European conference on Solid-State Transducers - Eurosensors 2006, Eurosensors 20th Edition]

Boltryk, Peter J., Hill, Martyn, McBride, John W. and Nascè, Antony (2008) A comparison of precision optical displacement sensors for the 3-D measurement of complex surface profiles. [In special issue: Eurosensors XX The 20th European conference on Solid-State Transducers - Eurosensors 2006, Eurosensors 20th Edition] Sensors and Actuators A: Physical, 142, (1), pp. 2-11. (doi:10.1016/j.sna.2007.03.006).

Record type: Article

Abstract

Non-contact optical sensors, combined with a raster scanning system, can be used in surface metrology applications such as MEMS processing to build high-precision topological surface maps representing the surface profile. We compare three optical displacement sensors for the measurement of complex surfaces, focussing on early sound recordings, and recommend sensor selection based on parameters including measurement area, time and resolution.

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More information

e-pub ahead of print date: 14 March 2007
Published date: 10 March 2008
Keywords: non-contact metrology, optical displacement sensor, profilometer, sound recovery

Identifiers

Local EPrints ID: 49060
URI: http://eprints.soton.ac.uk/id/eprint/49060
ISSN: 0924-4247
PURE UUID: 6c1b21dd-e7da-4a7c-bbb1-9fa8aceeedbf
ORCID for Martyn Hill: ORCID iD orcid.org/0000-0001-6448-9448

Catalogue record

Date deposited: 25 Oct 2007
Last modified: 17 Jul 2017 14:57

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Contributors

Author: Peter J. Boltryk
Author: Martyn Hill ORCID iD
Author: John W. McBride
Author: Antony Nascè

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