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Stealth dicing of silicon wafer using 1-µm femtosecond laser pulses

Stealth dicing of silicon wafer using 1-µm femtosecond laser pulses
Stealth dicing of silicon wafer using 1-µm femtosecond laser pulses
Shayeganrad, Gholamreza
8ea55a9a-4fe2-49df-a0f4-55fa81596dab
Kim, Jongki
6bb59a35-d930-43cd-aba8-b3188ee5eb5e
Lee, Timothy
7a3d744e-344c-49b6-998e-5dabcd8f2f3a
Beresna, Martynas
b0bb9665-1128-40ec-9910-5fdd82874312
Brambilla, Gilberto
815d9712-62c7-47d1-8860-9451a363a6c8
Nilsson, Johan
f41d0948-4ca9-4b93-b44d-680ca0bf157b
Jung, Yongmin
6685e51e-be47-4c96-8c4b-65aee3b5126d
Shayeganrad, Gholamreza
8ea55a9a-4fe2-49df-a0f4-55fa81596dab
Kim, Jongki
6bb59a35-d930-43cd-aba8-b3188ee5eb5e
Lee, Timothy
7a3d744e-344c-49b6-998e-5dabcd8f2f3a
Beresna, Martynas
b0bb9665-1128-40ec-9910-5fdd82874312
Brambilla, Gilberto
815d9712-62c7-47d1-8860-9451a363a6c8
Nilsson, Johan
f41d0948-4ca9-4b93-b44d-680ca0bf157b
Jung, Yongmin
6685e51e-be47-4c96-8c4b-65aee3b5126d

Shayeganrad, Gholamreza, Kim, Jongki, Lee, Timothy, Beresna, Martynas, Brambilla, Gilberto, Nilsson, Johan and Jung, Yongmin (2024) Stealth dicing of silicon wafer using 1-µm femtosecond laser pulses. CLEO 2024: Conference on Lasers and Electro-Optics, , Charlotte, United States. 05 - 10 May 2024.

Record type: Conference or Workshop Item (Paper)

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More information

Published date: 5 May 2024
Venue - Dates: CLEO 2024: Conference on Lasers and Electro-Optics, , Charlotte, United States, 2024-05-05 - 2024-05-10
Learn more about Optoelectronics Research Centre research

Identifiers

Local EPrints ID: 490782
URI: http://eprints.soton.ac.uk/id/eprint/490782
PURE UUID: 9371f80b-5e25-4ff6-966b-62e635e0214b
ORCID for Gholamreza Shayeganrad: ORCID iD orcid.org/0000-0002-5225-2176
ORCID for Gilberto Brambilla: ORCID iD orcid.org/0000-0002-5730-0499
ORCID for Johan Nilsson: ORCID iD orcid.org/0000-0003-1691-7959
ORCID for Yongmin Jung: ORCID iD orcid.org/0000-0002-9054-4372

Catalogue record

Date deposited: 06 Jun 2024 16:43
Last modified: 07 Jun 2024 01:55

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Contributors

Author: Gholamreza Shayeganrad ORCID iD
Author: Jongki Kim
Author: Timothy Lee
Author: Martynas Beresna
Author: Gilberto Brambilla ORCID iD
Author: Johan Nilsson ORCID iD
Author: Yongmin Jung ORCID iD

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