Picometre optical topological metrology of nanostructures at a million measurements per second

Chi, Cheng-Hung, Grant, Thomas Alfred, MacDonald, Kevin F. and Zheludev, Nikolay I. (2024) Picometre optical topological metrology of nanostructures at a million measurements per second. SPIE Optics + Photonics 2024, , San Diego, United States. 18 - 22 Aug 2024. 1 pp .

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Published date: 18 August 2024

Venue - Dates: SPIE Optics + Photonics 2024, , San Diego, United States, 2024-08-18 - 2024-08-22

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Local EPrints ID: 491283

URI: http://eprints.soton.ac.uk/id/eprint/491283

PURE UUID: 96164029-f9d4-4220-9792-d7234160951f

ORCID for Kevin F. MacDonald:

orcid.org/0000-0002-3877-2976

ORCID for Nikolay I. Zheludev:

orcid.org/0000-0002-1013-6636

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Date deposited: 18 Jun 2024 16:59

Last modified: 19 Jun 2024 01:36

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Contributors

Author: Cheng-Hung Chi

Author: Thomas Alfred Grant

Author: Kevin F. MacDonald

Author: Nikolay I. Zheludev

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