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A comparison of precision optical displacement sensors for the 3-D measurement of complex surface profiles

A comparison of precision optical displacement sensors for the 3-D measurement of complex surface profiles
A comparison of precision optical displacement sensors for the 3-D measurement of complex surface profiles
Non-contact optical sensors, combined with a raster scanning system, can be used in surface metrology applications such as MEMS processing to build high-precision topological surface maps representing the surface profile. We compare three optical displacement sensors for the measurement of complex surfaces, focussing on early sound recordings, and recommend sensor selection based on parameters including measurement area, time and resolution.
Boltryk, P.J.
82ca101e-7a14-49b5-8ac9-177a5a739c29
Hill, M.
0cda65c8-a70f-476f-b126-d2c4460a253e
McBride, J.W.
d9429c29-9361-4747-9ba3-376297cb8770
Nasce, A.
2501f7e6-36b7-4e85-829b-a74e104dd8a4
Boltryk, P.J.
82ca101e-7a14-49b5-8ac9-177a5a739c29
Hill, M.
0cda65c8-a70f-476f-b126-d2c4460a253e
McBride, J.W.
d9429c29-9361-4747-9ba3-376297cb8770
Nasce, A.
2501f7e6-36b7-4e85-829b-a74e104dd8a4

Boltryk, P.J., Hill, M., McBride, J.W. and Nasce, A. (2006) A comparison of precision optical displacement sensors for the 3-D measurement of complex surface profiles. 20th Eurosensors Conference Anniversary (Eurosensors XX). 17 - 20 Sep 2006.

Record type: Conference or Workshop Item (Paper)

Abstract

Non-contact optical sensors, combined with a raster scanning system, can be used in surface metrology applications such as MEMS processing to build high-precision topological surface maps representing the surface profile. We compare three optical displacement sensors for the measurement of complex surfaces, focussing on early sound recordings, and recommend sensor selection based on parameters including measurement area, time and resolution.

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More information

Published date: September 2006
Venue - Dates: 20th Eurosensors Conference Anniversary (Eurosensors XX), 2006-09-17 - 2006-09-20

Identifiers

Local EPrints ID: 49162
URI: https://eprints.soton.ac.uk/id/eprint/49162
PURE UUID: 916fd019-bd9e-4a65-b80f-1f4565bad764
ORCID for M. Hill: ORCID iD orcid.org/0000-0001-6448-9448

Catalogue record

Date deposited: 25 Oct 2007
Last modified: 14 Mar 2019 01:54

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