Design of efficient single-etch grating couplers for silicon nitride photonics at 1550 NM
Design of efficient single-etch grating couplers for silicon nitride photonics at 1550 NM
We present the design of single-etch grating couplers implemented on native and a hybrid silicon nitride (SiN) photonic platform with amorphous silicon (α-Si) overlays, operating in the telecom waveband. The SiN-only grating coupler has a coupling loss of -3.6 dB and a 1-dB bandwidth of 37 nm. A hybrid α-Si-on-SiN platform yields improved coupling loss of -1.4 dB and -1 dB for uniform and subwavelength grating apodized designs, respectively.
grating coupler, silicon nitride, silicon photonics
Fraser, William
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Benedikovic, Daniel
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Korček, Radovan
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Milanizadeh, Maziyar
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Dominguez Bucio, Thalia
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Vitali, Valerio
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Gardes, Frederic
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Schmid, Jens H.
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Cheben, Pavel
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Ye, Winnie N.
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14 August 2024
Fraser, William
c1d9b017-bc9a-4754-8d2e-598f729ac816
Benedikovic, Daniel
1ae5b7b3-770d-4919-8581-f37180e9d830
Korček, Radovan
eb582c99-62ed-4995-9277-1c0535edba84
Milanizadeh, Maziyar
27d077f0-5fc2-4d37-b34e-37d21e8ef17c
Dominguez Bucio, Thalia
83b57799-c566-473c-9b53-92e9c50b4287
Vitali, Valerio
9d6bfb8c-2e4a-462a-a4d5-03a92f72bb2b
Gardes, Frederic
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Schmid, Jens H.
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Cheben, Pavel
ab8ffd13-bc5c-44cb-88ed-605e3c347848
Ye, Winnie N.
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Fraser, William, Benedikovic, Daniel, Korček, Radovan, Milanizadeh, Maziyar, Dominguez Bucio, Thalia, Vitali, Valerio, Gardes, Frederic, Schmid, Jens H., Cheben, Pavel and Ye, Winnie N.
(2024)
Design of efficient single-etch grating couplers for silicon nitride photonics at 1550 NM.
In 2024 Photonics North (PN).
(doi:10.1109/PN62551.2024.10621817).
Record type:
Conference or Workshop Item
(Paper)
Abstract
We present the design of single-etch grating couplers implemented on native and a hybrid silicon nitride (SiN) photonic platform with amorphous silicon (α-Si) overlays, operating in the telecom waveband. The SiN-only grating coupler has a coupling loss of -3.6 dB and a 1-dB bandwidth of 37 nm. A hybrid α-Si-on-SiN platform yields improved coupling loss of -1.4 dB and -1 dB for uniform and subwavelength grating apodized designs, respectively.
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Published date: 14 August 2024
Venue - Dates:
2024 Photonics North, , Vancouver, Canada, 2024-05-28 - 2024-05-30
Keywords:
grating coupler, silicon nitride, silicon photonics
Identifiers
Local EPrints ID: 494393
URI: http://eprints.soton.ac.uk/id/eprint/494393
PURE UUID: 32cd6bf0-2951-4434-b230-7f178ab3d1c0
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Date deposited: 07 Oct 2024 17:09
Last modified: 08 Oct 2024 01:57
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Contributors
Author:
William Fraser
Author:
Daniel Benedikovic
Author:
Radovan Korček
Author:
Maziyar Milanizadeh
Author:
Thalia Dominguez Bucio
Author:
Valerio Vitali
Author:
Frederic Gardes
Author:
Jens H. Schmid
Author:
Pavel Cheben
Author:
Winnie N. Ye
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