This dataset is for the paper titled "Electrodeposition of 2D layered tungsten diselenide thin films using a single source precursor" Royal Society of Chemistry (RSC) Journal of Materials Chemistry C, DOI 10.1039/d4tc02755h. Please use this DOI for any citations. Dataset DOI: https://doi.org/10.5258/SOTON/D3281 Shibin Thomas, Victoria K. Greenacre, Jiapei Zhang, Nikolay Zhelev, Sami Ramadan, Yisong Han, Richard Beanland, Nema M. Abdelazim, Yasir J. Noori, Kees de Groot, Gillian Reid and Philip N Bartlett The dataset contains excel files containing the data for Figure 1a: Cyclic voltammogram (CV) of WSeCl4 single source precursor in acetonitrile on a TiN (diameter 0.4 cm) electrode. Figure 2a: Cyclic voltammogram (two cycles) of WSeCl4 in acetonitrile on a Pt- coated quartz electrode (diameter 1.3 cm) in the electrochemical quartz crystal microbalance(EQCM). Figure 2b: The mass change vs. applied potential during the CV cycles in EQCM. Figure 2c: Current transients during a potentiostatic deposition at -1.4 V for 5 minutes on a Pt-coated quartz electrode in EQCM. Figure 2d: The mass change vs. time during a potentiostatic deposition at -1.4 V for 5 minutes in EQCM. Figure 3a inset : Energy dispersive X-ray spectroscopy (EDS) profile of the WSe2 thin film. Figure 3c: Grazing incidence X-ray diffraction (XRD) pattern from the as-deposited and annealed WSe2 thin films. Figure 4a: X-ray photoelectron spectroscopy(XPS) measurements across the tungsten binding energy range for the WSe2 thin film. Figure 4b: XPS measurements across the selenium binding energy range for the WSe2 thin film. Figure 5: Raman spectra recorded from the as-deposited and annealed WSe2 thin films using 532 nm laser excitation. Figure 6c: Raman spectra recorded from the WSe2 films deposited in the 2, 4, 6 and 8 μm electrode channels. Figure 6d: Current–voltage sweeps from the WSe2 films deposited in the 2, 4, 6 and 8 μm electrode channels. Figure S1 : Cyclic voltammogram of the supporting electrolyte (0.1 M [Et4N]Cl in acetonitrile) on a TiN (diameter 0.4 cm) electrode. Figure S2 : Multiple scans of the cyclic voltammogram of WSeCl4 in acetonitrile on a TiN (diameter 0.4 cm) electrode. Figure S3 : Cyclic voltammogram of WCl6 in acetonitrile on a TiN (diameter 0.4 cm) electrode. Figure S5 C: AFM height profile of a WSe2 thin film deposited on TiN electrode. Licence CC/BY