GeAsSeTe/GeAsSe pedestal waveguides for long-wave infrared tunable on-chip spectroscopy

Abstract

A dry-etched pedestal chalcogenide waveguide platform, designed for use in long-wave IR spectrometer applications, is demonstrated, fabricated and optically characterized. The optical layers were deposited on pre-patterned dry-etched silicon pedestals. An exceptionally low waveguide propagation loss was measured, at around 0.1 dB/cm at λ = 10 μm. The modal thermo-optic coefficient of the waveguide was experimentally estimated to be approximately 1.1 × 10−4 C−1 at λ = 1.63 μm, which is comparable to that of Si and GaAs. Waveguide spiral interferometers were fabricated, proving the potential for realization of more complex, chalcogenide-based, integrated photonic circuits. The combination of low propagation losses and a strong thermo-optic coefficient makes this platform an ideal candidate for utilization in on-chip tunable spectrometers in the long-wave IR wavelength band.

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Identifiers

ORCID for Sirawit Boonsit: orcid.org/0000-0002-1453-2855

ORCID for James Shafto Wilkinson: orcid.org/0000-0003-4712-1697

ORCID for Ganapathy Senthil Murugan: orcid.org/0000-0002-2733-3273

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