READ ME File For 'Dataset title' Dataset DOI: 10.5258/SOTON/D3288 Date that the file was created: Feb, 2025 ------------------- GENERAL INFORMATION ------------------- ReadMe Author: Kai Sun, University of Southampton -------------------------- SHARING/ACCESS INFORMATION -------------------------- Licenses/restrictions placed on the data, or limitations of reuse:CC-BY Recommended citation for the data: This dataset supports the publication: AUTHORS:Yuxin Du, Callum Wheeler, Cornelis H. (Kees) de Groot, Otto L. Muskens, Xu Fang, and Kai Sun TITLE:Low-temperature vanadium dioxide for CMOS integration and flexible polyimide applications JOURNAL:Optical Materials Express 15 (3) 465-476 PAPER DOI IF KNOWN:10.1364/OME.546761 -------------------- DATA & FILE OVERVIEW -------------------- Dataset consists of a single excel file with spreadsheet for each subfigure/figure with following formats Main manuscript Figure 1: Figure 1a: no associated data. Figure 1b: no associated data. Figure 1c: no associated data. Figure 1d: no associated data. Figure 1e: no associated data. Figure 1f: no associated data. Figure 2:Sheet Fig.2 Raman shift vs different anneal temperature. Figure 3: Figure 3a: Sheet Fig.3(a) XPS data of unannealed sample. Figure 3b: Sheet Fig.3(b) XPS data of 250 °C annealed sample. Figure 3c: Sheet Fig.3(c) XPS data of 300 °C annealed sample. Figure 3d: Sheet Fig.3(d) XPS data of 350 °C annealed sample. Figure 3e: Sheet Fig.3(e) XPS data of 400 °C annealed sample. Figure 4: Figure 4a: Sheet Fig.4(a) FTIR reflectance spectra at different temperatures (250C anneal temperature). Figure 4b: Sheet Fig.4(b) FTIR reflectance spectra at different temperatures (300C anneal temperature). Figure 4c: Sheet Fig.4(c) FTIR reflectance spectra at different temperatures (350C anneal temperature). Figure 4d: Sheet Fig.4(d) FTIR reflectance spectra at different temperatures (400C anneal temperature). Figure 4e: Sheet Fig.4(e) IR emissivity hysteresis for anneals at 300 °C Figure 4f: Sheet Fig.4(f) IR emissivity hysteresis for anneals at 350 °C Figure 5: Figure 5a: no associated data. Figure 5b: Sheet Fig.5(b) Raman shift of Kapton comparing with VO2 and V2O5 reference samples. Figure 5c: Sheet Fig.5(c) FTIR reflectance spectra on Kapton (300C anneal temperature). Figure 5d: Sheet Fig.5(d) IR emissivity hysteresis for Kapton anneals at 300C. Supporting Information Figure S1: no associated data. Figure S2: Sheet Fig.S2, COMSOL simulated FTIR reflectance spectra under different SiO2 thickness.