Physical machining of chambers, vias, and monolithic mirrors in silicon for quantum technologies

Gow, Paul C., Churchill, Glenn, Keen, Joel Mark Nelson, Gawith, Corin and Gates, James (2025) Physical machining of chambers, vias, and monolithic mirrors in silicon for quantum technologies. CLEO/Europe-EQEC 2025, , Munich, Germany. 23 - 27 Jun 2025.

Record type: Conference or Workshop Item (Poster)

Abstract

We present a scalable ultra-precision micro-machining approach to 2.5D fabrication of quantum components. Apertures, wells, and vias were achieved in up to 6mm thick silicon, as well as internal, optical-grade mirrors for light coupling.

This record has no associated files available for download.

More information

Published date: June 2025

Venue - Dates: CLEO/Europe-EQEC 2025, , Munich, Germany, 2025-06-23 - 2025-06-27

Identifiers

Local EPrints ID: 501961

URI: http://eprints.soton.ac.uk/id/eprint/501961

PURE UUID: 4ecfd93d-4783-4717-a795-334e9dbf32c3

ORCID for Paul C. Gow:

orcid.org/0000-0002-3247-9082

ORCID for Glenn Churchill:

orcid.org/0000-0001-7621-7618

ORCID for Joel Mark Nelson Keen:

orcid.org/0009-0002-2350-4044

ORCID for Corin Gawith:

orcid.org/0000-0002-3502-3558

ORCID for James Gates:

orcid.org/0000-0001-8671-5987

Catalogue record

Date deposited: 12 Jun 2025 17:04

Last modified: 13 Jun 2025 02:14

Export record

Share this record

Share this on Facebook Share this on Twitter Share this on Weibo

Contributors

Author: Paul C. Gow

Author: Glenn Churchill

Author: Joel Mark Nelson Keen

Author: Corin Gawith

Author: James Gates

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Library staff additional information