READ ME File For 'The dataset for phd thesis 'Nanometrology with structured light and artificial intelligence' Dataset DOI: 10.5258/SOTON/D3574 Date that the file was created: June, 2025 ------------------- GENERAL INFORMATION ------------------- ReadMe Author: Yu Wang, University of Southampton, ORCID ID 0000-0002-0636-5102 This dataset supports the thesis entitled 'Nanometrology with Structured Light and Artificial Intelligence' AWARDED BY: University of Southampton DATE OF AWARD: 2025 DOI: https://dio.org/10.5258/SOTON/T0083 Date of data collection: 2020-2025 Related projects/Funders: Physical Science Research Council (grants EP/T02643X/1, EP/X03495X/1), the Royal Society (project number RG\R2\232531), the Singapore National Research Foundation (grant No. NRF-CRP23-2019-0006), and the Singapore Ministry of Education (grant MOE2016-T3-1-006) ------------------------ DESCRIPTION OF THE DATA ------------------------ This dataset contains: Fig. 1.1-1.3, Fig. 2.1-2.19, Fig. 3.1-3.11, Fig. 4.1-4.6, Fig. 5.1-5.6, Fig. 6.1-6.7, Fig. 7.1-7.4, Fig. A.1 All data table Neural network models -------------------------- SHARING/ACCESS INFORMATION -------------------------- Licence: CC-BY Recommended citation for the data: This dataset supports the thesis: Yu Wang (2025) The dataset for phd thesis 'Nanometrology with structured light and artificial intelligence', University of Southampton, https://doi.org/10.5258/SOTON/D3574