Investigation of SiO2 cladding application on Ta2O5 films for reduction of delamination during dicing
Investigation of SiO2 cladding application on Ta2O5 films for reduction of delamination during dicing
Tantalum pentoxide ((Formula presented.)) is of interest in photonics due to its optical properties, including high non-linear refractive index and low optical propagation losses. Here we investigate mechanical dicing parameters, including depth of cut and material feed rate, to produce optical quality facets in a multilayered (Formula presented.) platform. (Formula presented.) films were deposited through sputtering onto a silicon substrate with a 6 (Formula presented.) thermal oxide. (Formula presented.) cladding layers were applied using different techniques: HELIOS sputtering, PECVD, and PECVD with TEOS. These were then diced using the same parameters and observed via optical microscope and SEM to determine the most effective cladding. The (Formula presented.) applied using HELIOS showed the best adhesion during dicing, with no chipping or delamination.
adhesion, integrated optoelectronics, micromachining, photonics, silicon, tantalum
Gow, Paul C.
193394b1-fe2d-41de-a9aa-6de7e5925b18
Wang, Wenjie
f06ced2c-bc2f-4816-92cf-f0ad49f63565
Churchill, Glenn
5933a331-fba3-444b-8352-273112c3d6a6
Charlton, M.D.B
388d72a8-13be-4bf7-8291-52d7a51d3c3d
Gawith, Corin
926665c0-84c7-4a1d-ae19-ee6d7d14c43e
Gates, James
b71e31a1-8caa-477e-8556-b64f6cae0dc2
8 October 2025
Gow, Paul C.
193394b1-fe2d-41de-a9aa-6de7e5925b18
Wang, Wenjie
f06ced2c-bc2f-4816-92cf-f0ad49f63565
Churchill, Glenn
5933a331-fba3-444b-8352-273112c3d6a6
Charlton, M.D.B
388d72a8-13be-4bf7-8291-52d7a51d3c3d
Gawith, Corin
926665c0-84c7-4a1d-ae19-ee6d7d14c43e
Gates, James
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Gow, Paul C., Wang, Wenjie, Churchill, Glenn, Charlton, M.D.B, Gawith, Corin and Gates, James
(2025)
Investigation of SiO2 cladding application on Ta2O5 films for reduction of delamination during dicing.
Electronics Letters, 61 (1), [e70442].
(doi:10.1049/ell2.70442).
Abstract
Tantalum pentoxide ((Formula presented.)) is of interest in photonics due to its optical properties, including high non-linear refractive index and low optical propagation losses. Here we investigate mechanical dicing parameters, including depth of cut and material feed rate, to produce optical quality facets in a multilayered (Formula presented.) platform. (Formula presented.) films were deposited through sputtering onto a silicon substrate with a 6 (Formula presented.) thermal oxide. (Formula presented.) cladding layers were applied using different techniques: HELIOS sputtering, PECVD, and PECVD with TEOS. These were then diced using the same parameters and observed via optical microscope and SEM to determine the most effective cladding. The (Formula presented.) applied using HELIOS showed the best adhesion during dicing, with no chipping or delamination.
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Submitted date: 19 March 2025
Accepted/In Press date: 29 September 2025
e-pub ahead of print date: 8 October 2025
Published date: 8 October 2025
Keywords:
adhesion, integrated optoelectronics, micromachining, photonics, silicon, tantalum
Identifiers
Local EPrints ID: 502594
URI: http://eprints.soton.ac.uk/id/eprint/502594
ISSN: 0013-5194
PURE UUID: 11a4759f-49bd-4853-bd6b-a70c41e14e8b
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Date deposited: 01 Jul 2025 16:53
Last modified: 26 Nov 2025 02:59
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