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A self-aligned high-mobility graphene transistor: decoupling the channel with fluorographene to reduce scattering

A self-aligned high-mobility graphene transistor: decoupling the channel with fluorographene to reduce scattering
A self-aligned high-mobility graphene transistor: decoupling the channel with fluorographene to reduce scattering

The conduction channel of a graphene field-effect transistor (FET) is decoupled from the parasitic charge impurities of the underlying substrate. Fluorographene as a passivation layer is fabricated between the oxide substrate and channel, and a self-aligned gate-terminated FET is also fabricated. This approach significantly reduces the scattering and, as a result, the mobility increases ten fold.

field-effect transistors, fluorographene, graphene, scattering, self-aligned
0935-9648
6519-6525
Ho, Kuan I.
b3250014-94d6-4239-a9b2-ebe6f3f8d450
Boutchich, Mohamed
7d0f80c6-5497-40ed-adfa-82dfef93d909
Su, Ching Yuan
fb75d295-07f1-49c2-93b5-38a70cc715e4
Moreddu, Rosalia
8a5d77bc-dac4-4966-baa3-be26c5eec1ef
Marianathan, Eugene Sebastian Raj
0e608e1e-74ba-4f44-839c-996ad38cea10
Montes, Laurent
35192900-809c-4da4-af56-1b3dada415f9
Lai, Chao Sung
e8e98d37-f713-417d-9f82-89d14aea5c4d
Ho, Kuan I.
b3250014-94d6-4239-a9b2-ebe6f3f8d450
Boutchich, Mohamed
7d0f80c6-5497-40ed-adfa-82dfef93d909
Su, Ching Yuan
fb75d295-07f1-49c2-93b5-38a70cc715e4
Moreddu, Rosalia
8a5d77bc-dac4-4966-baa3-be26c5eec1ef
Marianathan, Eugene Sebastian Raj
0e608e1e-74ba-4f44-839c-996ad38cea10
Montes, Laurent
35192900-809c-4da4-af56-1b3dada415f9
Lai, Chao Sung
e8e98d37-f713-417d-9f82-89d14aea5c4d

Ho, Kuan I., Boutchich, Mohamed, Su, Ching Yuan, Moreddu, Rosalia, Marianathan, Eugene Sebastian Raj, Montes, Laurent and Lai, Chao Sung (2015) A self-aligned high-mobility graphene transistor: decoupling the channel with fluorographene to reduce scattering. Advanced Materials, 27 (41), 6519-6525. (doi:10.1002/adma.201502544).

Record type: Article

Abstract

The conduction channel of a graphene field-effect transistor (FET) is decoupled from the parasitic charge impurities of the underlying substrate. Fluorographene as a passivation layer is fabricated between the oxide substrate and channel, and a self-aligned gate-terminated FET is also fabricated. This approach significantly reduces the scattering and, as a result, the mobility increases ten fold.

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More information

Published date: 1 November 2015
Additional Information: Publisher Copyright: © 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Keywords: field-effect transistors, fluorographene, graphene, scattering, self-aligned

Identifiers

Local EPrints ID: 503357
URI: http://eprints.soton.ac.uk/id/eprint/503357
ISSN: 0935-9648
PURE UUID: a15ccb33-59c4-40f1-825b-dca9bee53758
ORCID for Rosalia Moreddu: ORCID iD orcid.org/0000-0002-0332-1606

Catalogue record

Date deposited: 29 Jul 2025 17:01
Last modified: 30 Jul 2025 02:14

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Contributors

Author: Kuan I. Ho
Author: Mohamed Boutchich
Author: Ching Yuan Su
Author: Rosalia Moreddu ORCID iD
Author: Eugene Sebastian Raj Marianathan
Author: Laurent Montes
Author: Chao Sung Lai

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