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Ultra-precision diamond micro-grinding of integrated mirrors in silicon for quantum atomic technologies

Ultra-precision diamond micro-grinding of integrated mirrors in silicon for quantum atomic technologies
Ultra-precision diamond micro-grinding of integrated mirrors in silicon for quantum atomic technologies
We present vacuum cell components fabricated in 6mm thick silicon using diamond micro-grinding tools. Features include apertures, vias, and low chipping suitable for bonding. We also present ductile machining to produce optical-grade mirrors internal to the vacuum cell frames, with angles not restricted to crystal planes as in etching.
Gow, Paul C.
193394b1-fe2d-41de-a9aa-6de7e5925b18
Keen, Joel
8303157c-da0d-451d-8d97-a93b483d0283
Churchill, Glenn
5933a331-fba3-444b-8352-273112c3d6a6
Gawith, Corin
926665c0-84c7-4a1d-ae19-ee6d7d14c43e
Gates, James
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Gow, Paul C.
193394b1-fe2d-41de-a9aa-6de7e5925b18
Keen, Joel
8303157c-da0d-451d-8d97-a93b483d0283
Churchill, Glenn
5933a331-fba3-444b-8352-273112c3d6a6
Gawith, Corin
926665c0-84c7-4a1d-ae19-ee6d7d14c43e
Gates, James
b71e31a1-8caa-477e-8556-b64f6cae0dc2

Gow, Paul C., Keen, Joel, Churchill, Glenn, Gawith, Corin and Gates, James (2025) Ultra-precision diamond micro-grinding of integrated mirrors in silicon for quantum atomic technologies. 51st International Micro and<br/>Nano Engineering Conference, NOCS, Southampton, United Kingdom. 15 - 18 Sep 2025.

Record type: Conference or Workshop Item (Paper)

Abstract

We present vacuum cell components fabricated in 6mm thick silicon using diamond micro-grinding tools. Features include apertures, vias, and low chipping suitable for bonding. We also present ductile machining to produce optical-grade mirrors internal to the vacuum cell frames, with angles not restricted to crystal planes as in etching.

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Published date: June 2025
Venue - Dates: 51st International Micro and<br/>Nano Engineering Conference, NOCS, Southampton, United Kingdom, 2025-09-15 - 2025-09-18
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Identifiers

Local EPrints ID: 505195
URI: http://eprints.soton.ac.uk/id/eprint/505195
PURE UUID: 85dd84cd-4d65-40e5-a410-460234a5cfdd
ORCID for Paul C. Gow: ORCID iD orcid.org/0000-0002-3247-9082
ORCID for Joel Keen: ORCID iD orcid.org/0009-0002-2350-4044
ORCID for Glenn Churchill: ORCID iD orcid.org/0000-0001-7621-7618
ORCID for Corin Gawith: ORCID iD orcid.org/0000-0002-3502-3558
ORCID for James Gates: ORCID iD orcid.org/0000-0001-8671-5987

Catalogue record

Date deposited: 01 Oct 2025 16:47
Last modified: 02 Oct 2025 04:01

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Contributors

Author: Paul C. Gow ORCID iD
Author: Joel Keen ORCID iD
Author: Glenn Churchill ORCID iD
Author: Corin Gawith ORCID iD
Author: James Gates ORCID iD

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