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Dataset for Investigation of SiO2 cladding application on Ta2O5 films for reduction of delamination during dicing

Dataset for Investigation of SiO2 cladding application on Ta2O5 films for reduction of delamination during dicing
Dataset for Investigation of SiO2 cladding application on Ta2O5 films for reduction of delamination during dicing
This dataset contains all data and method description to support the publication of "Investigation of SiO2 cladding application on Ta2O5 films for reduction of delamination during dicing". The dataset includes parameters for film deposition and the measurement data of these fabricated films. There are also microscope images and scanning electron microscope images of the films after mechanical dicing.
University of Southampton
Gow, Paul
193394b1-fe2d-41de-a9aa-6de7e5925b18
Wang, Wenjie (Jessie)
1f71417b-de9d-4d4d-9384-cb7c1ea84136
Churchill, Glenn
5933a331-fba3-444b-8352-273112c3d6a6
Gow, Paul
193394b1-fe2d-41de-a9aa-6de7e5925b18
Wang, Wenjie (Jessie)
1f71417b-de9d-4d4d-9384-cb7c1ea84136
Churchill, Glenn
5933a331-fba3-444b-8352-273112c3d6a6

Gow, Paul, Wang, Wenjie (Jessie) and Churchill, Glenn (2025) Dataset for Investigation of SiO2 cladding application on Ta2O5 films for reduction of delamination during dicing. University of Southampton doi:10.5258/SOTON/D3655 [Dataset]

Record type: Dataset

Abstract

This dataset contains all data and method description to support the publication of "Investigation of SiO2 cladding application on Ta2O5 films for reduction of delamination during dicing". The dataset includes parameters for film deposition and the measurement data of these fabricated films. There are also microscope images and scanning electron microscope images of the films after mechanical dicing.

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More information

Published date: 2025

Identifiers

Local EPrints ID: 505597
URI: http://eprints.soton.ac.uk/id/eprint/505597
DOI: doi:10.5258/SOTON/D3655
PURE UUID: 096c97ef-ca45-40e8-8214-c402de5a801b
ORCID for Paul Gow: ORCID iD orcid.org/0000-0002-3247-9082
ORCID for Wenjie (Jessie) Wang: ORCID iD orcid.org/0000-0001-5739-3085
ORCID for Glenn Churchill: ORCID iD orcid.org/0000-0001-7621-7618

Catalogue record

Date deposited: 14 Oct 2025 16:48
Last modified: 15 Oct 2025 02:17

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Contributors

Creator: Paul Gow ORCID iD
Creator: Wenjie (Jessie) Wang ORCID iD
Creator: Glenn Churchill ORCID iD

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