Perfectly vertical coupling with high-efficiency Bi-layer grating coupler for thin film SiN technology
Perfectly vertical coupling with high-efficiency Bi-layer grating coupler for thin film SiN technology
Thin-film Silicon Nitride (TFSiN) platforms are gaining increasing interest in the integrated optics community due to their broad transparency range and low propagation loss [1]. However, the limited thickness of the waveguides (typically from 40 nm to 200 nm) poses a number of challenges, especially when it comes to light coupling between on-chip structures and optical fibers. Indeed, the low index contrast between the TFSiN waveguides and the surrounding silicon dioxide makes the design of efficient grating couplers (GCs) challenging.
Pennoni, Anna
19b60fb1-039c-41d5-a6c1-5893859bdf75
di Croce, Francesca
4029729f-5a59-44f7-afac-dd9be0fc1f82
Vitali, Valerio
9d6bfb8c-2e4a-462a-a4d5-03a92f72bb2b
Dominguez Bucio, Thalia
83b57799-c566-473c-9b53-92e9c50b4287
Liu, Hao
ef7502c1-75d1-47de-907e-3a3749f6e68b
Cristiani, Ilaria
ca05c320-279d-4b2a-af71-c506b3d20822
Gardes, Frederic
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Petropoulos, Periklis
522b02cc-9f3f-468e-bca5-e9f58cc9cad7
Lacava, Cosimo
f766dc0a-5a67-4656-87aa-f7f35c4a9ab6
15 August 2025
Pennoni, Anna
19b60fb1-039c-41d5-a6c1-5893859bdf75
di Croce, Francesca
4029729f-5a59-44f7-afac-dd9be0fc1f82
Vitali, Valerio
9d6bfb8c-2e4a-462a-a4d5-03a92f72bb2b
Dominguez Bucio, Thalia
83b57799-c566-473c-9b53-92e9c50b4287
Liu, Hao
ef7502c1-75d1-47de-907e-3a3749f6e68b
Cristiani, Ilaria
ca05c320-279d-4b2a-af71-c506b3d20822
Gardes, Frederic
7a49fc6d-dade-4099-b016-c60737cb5bb2
Petropoulos, Periklis
522b02cc-9f3f-468e-bca5-e9f58cc9cad7
Lacava, Cosimo
f766dc0a-5a67-4656-87aa-f7f35c4a9ab6
Pennoni, Anna, di Croce, Francesca, Vitali, Valerio, Dominguez Bucio, Thalia, Liu, Hao, Cristiani, Ilaria, Gardes, Frederic, Petropoulos, Periklis and Lacava, Cosimo
(2025)
Perfectly vertical coupling with high-efficiency Bi-layer grating coupler for thin film SiN technology.
In 2025 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC).
IEEE.
1 pp
.
(doi:10.1109/CLEO/Europe-EQEC65582.2025.11110562).
Record type:
Conference or Workshop Item
(Paper)
Abstract
Thin-film Silicon Nitride (TFSiN) platforms are gaining increasing interest in the integrated optics community due to their broad transparency range and low propagation loss [1]. However, the limited thickness of the waveguides (typically from 40 nm to 200 nm) poses a number of challenges, especially when it comes to light coupling between on-chip structures and optical fibers. Indeed, the low index contrast between the TFSiN waveguides and the surrounding silicon dioxide makes the design of efficient grating couplers (GCs) challenging.
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Published date: 15 August 2025
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Local EPrints ID: 505612
URI: http://eprints.soton.ac.uk/id/eprint/505612
PURE UUID: d6e6aaa5-270b-488d-a929-a94d2e7c38ad
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Date deposited: 14 Oct 2025 16:53
Last modified: 15 Oct 2025 01:58
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Contributors
Author:
Anna Pennoni
Author:
Francesca di Croce
Author:
Valerio Vitali
Author:
Thalia Dominguez Bucio
Author:
Hao Liu
Author:
Ilaria Cristiani
Author:
Frederic Gardes
Author:
Periklis Petropoulos
Author:
Cosimo Lacava
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