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Dataset in support of the journal article 'Production-ready double-side fabrication of dual-band infrared meta-optics using deep-UV lithography'

Dataset in support of the journal article 'Production-ready double-side fabrication of dual-band infrared meta-optics using deep-UV lithography'
Dataset in support of the journal article 'Production-ready double-side fabrication of dual-band infrared meta-optics using deep-UV lithography'
Dataset in support of the journal article 'Production-ready double-side fabrication of dual-band infrared meta-optics using deep-UV lithography'
University of Southampton
Sun, Kai
b7c648a3-7be8-4613-9d4d-1bf937fb487b
Yan, Xingzhao
e1f3f636-74e4-42d5-81c7-04feec2b85ba
Ou, Bruce (Jun-Yu)
3fb703e3-b222-46d2-b4ee-75f296d9d64d
Muskens, Otto
2284101a-f9ef-4d79-8951-a6cda5bfc7f9
Scott, Jordan
3844ab2b-ddc2-45b9-b09a-c4a4264b36e8
Sun, Kai
b7c648a3-7be8-4613-9d4d-1bf937fb487b
Yan, Xingzhao
e1f3f636-74e4-42d5-81c7-04feec2b85ba
Ou, Bruce (Jun-Yu)
3fb703e3-b222-46d2-b4ee-75f296d9d64d
Muskens, Otto
2284101a-f9ef-4d79-8951-a6cda5bfc7f9
Scott, Jordan
3844ab2b-ddc2-45b9-b09a-c4a4264b36e8

Sun, Kai, Yan, Xingzhao, Ou, Bruce (Jun-Yu), Muskens, Otto and Scott, Jordan (2025) Dataset in support of the journal article 'Production-ready double-side fabrication of dual-band infrared meta-optics using deep-UV lithography'. University of Southampton doi:10.5258/SOTON/D3494 [Dataset]

Record type: Dataset

Abstract

Dataset in support of the journal article 'Production-ready double-side fabrication of dual-band infrared meta-optics using deep-UV lithography'

Archive
SunACSNano2025dataset.zip - Dataset
Available under License Creative Commons Attribution.
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Text
readme.txt - Dataset
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More information

Published date: 31 December 2025
Learn more about Institute for Life Sciences research Learn more about Institute for Life Sciences research Learn more about School of Physics and Astronomy research

Identifiers

Local EPrints ID: 506133
URI: http://eprints.soton.ac.uk/id/eprint/506133
DOI: doi:10.5258/SOTON/D3494
PURE UUID: 89757e67-a09c-4ca0-a590-dba671d06e6b
ORCID for Kai Sun: ORCID iD orcid.org/0000-0001-6807-6253
ORCID for Bruce (Jun-Yu) Ou: ORCID iD orcid.org/0000-0001-8028-6130
ORCID for Otto Muskens: ORCID iD orcid.org/0000-0003-0693-5504

Catalogue record

Date deposited: 29 Oct 2025 17:32
Last modified: 30 Oct 2025 02:42

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Contributors

Creator: Kai Sun ORCID iD
Creator: Xingzhao Yan
Creator: Bruce (Jun-Yu) Ou ORCID iD
Creator: Otto Muskens ORCID iD
Creator: Jordan Scott

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