READ ME File For 'Dataset for Ultra-precision diamond grinding of vapour cells in silicon for quantum technology'

Dataset DOI:  https://doi.org/10.5258/SOTON/D3761

Date that the file was created: 12, 2025

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GENERAL INFORMATION
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ReadMe Author: Paul C. Gow, University of Southampton 

Date of data collection: ADD IN COLLECTION DATES

Information about geographic location of data collection: University of Southampton, UK. Faunhofer CAP, UK. Inex Microtechnology, UK.

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SHARING/ACCESS INFORMATION
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Licenses/restrictions placed on the data, or limitations of reuse: CC-BY

This dataset supports the publication:
AUTHORS: P.C. Gow, G.M. Churchill, J.W. Thomas, B. Steele, G. Quick, R. Elvin, L.J. McKnight, C.B.E. Gawith, J.C. Gates.
TITLE: Ultra-precision diamond grinding of vapour cells in silicon for quantum technology
JOURNAL: Journal of Micromechanics and Microengineering
PAPER DOI IF KNOWN: 

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DATA & FILE OVERVIEW
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This zipped dataset contains:

Folder "Spectroscopy Data"
Folder containing normalised datasets for the reference cell signal, etched cell signal, and signals from 5 of the machined cells taken during doppler-free saturated absorption spectroscopy testing. 'Cell5' data was used for the plot in the publication, alongside 'CellINEX', and 'CellRef'. 

File "CSI scan data.int"
Interferometric data file containing the surface scan of a chipped region on the machined wafer.